Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics
Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics
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金属、半导体和电介质的三维激光微加工
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
H. Misawa
中科院分区：
文献类型：
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作者：
S. Juodkazis;K. Nishimura;H. Okuno;Y. Tabuchi;S. Matsuo;Satoru Tanaka;H. Misawa
我们展示了飞秒激光照射材料的三维结构。通过对4H-SiC表面的激光光栅扫描，证明了波纹的自组织有序形成。该方法可扩展到具有和毫米横截面的区域。波纹状结构的情况下，在不同的材料的表面和体微结构的作用进行了讨论。场增强效应的纳米结构的表面和它们的作用，在波纹的形成进行了估计。
We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.
影响因子：
1.5
作者：
T. Tomita;K. Kinoshita;S. Matsuo;S. Hashimoto
通讯作者：
T. Tomita;K. Kinoshita;S. Matsuo;S. Hashimoto