Challenges with soft stamps for guiding of diblock copolymers
Challenges with soft stamps for guiding of diblock copolymers
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用于引导二嵌段共聚物的软印模面临的挑战
DOI：
10.1007/s00339-015-9409-4
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
K. Zimmer
中科院分区：
文献类型：
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作者：
C. Steinberg;M. Gubert;M. Papenheim;S. Wang;H.-C. Scheer;J. Zajadacz;K. Zimmer
通过引导嵌段共聚物（BCP）的相分离来制备纳米结构是克服传统光刻局限性的一项有吸引力的技术。行之有效的引导方法是在应用 BCP 之前在基板上提供拓扑图案（图形外延）或化学图案（化学外延）。本文报告了一种替代技术，即通过纳米压印从顶部提供引导图案，在不预先图案化基板的情况下引导 BCP。这种方法的好处是可以多次使用同一张邮票。在此报告的工作中，我们使用弹性体印模并检查毛细管力光刻 (CFL) 的引导作用。选择较高的加工温度以提供快速的相分离。为了控制基材的表面能，利用气相硅烷沉积。研究了层状聚苯乙烯-聚甲基丙烯酸甲酯 BCP 与 CFL 的有序行为。特别是，解决了压印情况下相分离的具体问题、局部不同的层厚度以及两种表面能对排序过程有贡献的事实，即基材的表面能和印模的表面能。尽管需要进一步优化才能利用 CFL 进行有效引导，但此处报告的第一个结果表明了该技术在邮票诱导 BCP 引导方面的潜力。由于它允许多次使用印模，因此这种引导很有趣，并且可以取代每个基板的耗时和成本高昂的预图案化。
The preparation of nanostructures by guiding the phase separation of a block copolymer (BCP) is an attractive technique to overcome the limitations of conventional lithography. Well-established methods for guiding are to provide a topographical pattern (grapho-epitaxy) or a chemical pattern (chemo-epitaxy) on the substrate before BCP application. This paper reports on an alternative technique, the guiding of the BCP without pre-patterning the substrate, by providing the guiding pattern from the top, by nanoimprint. This approach offers the benefit of a multiple use of the same stamp. In the work reported here, we use an elastomeric stamp and examine capillary force lithography (CFL) with respect to guiding. The processing temperature is chosen high in order to provide fast phase separation. For the control of the surface energy of the substrate, a silane deposition from the gas phase is utilized. The ordering behavior of a lamellar polystyrene–polymethylmethacrylate BCP with CFL is studied. In particular, the issues specific with phase separation in an imprint situation are addressed, the locally differing layer thickness and the fact that two surface energies contribute to the ordering process, the one of the substrate and the one of the stamp. Though further optimization is required to make use of CFL for efficient guiding, the first results reported here indicate the potential of this technique for stamp-induced guiding of BCPs. As it allows a multiple use of the stamp, such guiding is interesting and may replace the time- and cost-consuming pre-patterning of each substrate.
通过纳米压印光刻直接自上而下排序二嵌段共聚物
DOI：
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发表时间：
2011
期刊：
影响因子：
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作者：
M. Salaun;N. Kehagias;B. Salhi;T. Baron;J. Boussey;C. Torres;M. Zelsmann
通讯作者：
M. Zelsmann
嵌段共聚物的自由表面形貌： 1.苯乙烯-丁二烯二嵌段共聚物
DOI：
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发表时间：
1995
期刊：
影响因子：
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作者：
A. Turturro;E. Gattiglia;P. Vacca;G. Viola
通讯作者：
G. Viola