Nanometallic antenna-assisted amorphous silicon waveguide integrated bolometer for mid-infrared.
Nanometallic antenna-assisted amorphous silicon waveguide integrated bolometer for mid-infrared.
复制标题
纳米金属天线辅助非晶硅波导集成中红外测辐射热计。
作者：
Yangbo Wu;Z. Qu;A. Osman;Chen Wei;W. Cao;A. Tarazona;S. Oo;H. Chong;O. Muskens;G. Mashanovich;M. Nedeljkovic
辐射热测量计是广泛应用于中红外（MIR）波长范围的热探测器。在片上集成传感系统中，吸收整个中红外波长范围内的光的宽带可扩展测辐射热计可以发挥重要作用。在这项工作中，我们开发了一种基于波导的辐射热测量计，在非晶硅 (a-Si) 平台上工作，工作波长范围为 3.72-3.88 µm。与早期的绝缘体上硅 (SOI) 工作相比，辐射热测量计设计的显着改进使响应率提高了 20 倍。该测辐射热计在 3.8 µm 波长下每毫瓦输入功率的电阻变化为 24.62%。该测辐射热计的热导率为3.86×10-5W/K，未来通过重新设计器件几何形状，可能将热导率提高3个数量级。
Bolometers are thermal detectors widely applied in the mid-infrared (MIR) wavelength range. In an integrated sensing system on chip, a broadband scalable bolometer absorbing the light over the whole MIR wavelength range could play an important role. In this work, we have developed a waveguide-based bolometer operating in the wavelength range of 3.72-3.88 µm on the amorphous silicon (a-Si) platform. Significant improvements in the bolometer design result in a 20× improved responsivity compared to earlier work on silicon-on-insulator (SOI). The bolometer offers 24.62% change in resistance per milliwatt of input power at 3.8 µm wavelength. The thermal conductance of the bolometer is 3.86×10-5W/K, and an improvement as large as 3 orders magnitude may be possible in the future through redesign of the device geometry.
影响因子：
2.8
作者：
Nedeljkovic, M.;Khokhar, A. Z.;Mashanovich, G. Z.
通讯作者：
Mashanovich, G. Z.
影响因子：
3.8
作者：
Gallacher, K.;Millar, R. W.;Paul, D. J.
通讯作者：
Paul, D. J.