Impact of surface and residual stresses and electro-/magnetostatic axial loading on the suspended nanomechanical based mass sensors: A theoretical study
Impact of surface and residual stresses and electro-/magnetostatic axial loading on the suspended nanomechanical based mass sensors: A theoretical study
复制标题
表面和残余应力以及静电/静磁轴向载荷对基于悬浮纳米力学的质量传感器的影响：理论研究
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
I. Stachiv
中科院分区：
文献类型：
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作者：
I. Stachiv
悬浮纳米机械质量传感器能够通过共振频率的偏移来检测附着的分子或颗粒。然而，表面和残余应力也可能导致传感器谐振的变化。因此，了解应力对质量传感器的精度和灵敏度的影响是对实验数据进行严格分析的基本要求。在这里，我们提出了一个详细的理论研究的悬浮纳米机械谐振器和质量传感器下的轴向负载所产生的表面（残余）应力或静电（静磁）力。容易获得的公式，允许一个准确地预测梁的谐振频率下的拉伸/压缩或解开的影响的应力（轴向力）和分子质量上的频率偏移的悬挂质量传感器已被导出。一个无量纲参数，使我们能够简单地表征设备的振动状态（即，梁，弦，还是梁...
Suspended nanomechanical mass sensors are capable to detect the attached molecules or particles through the shifts in the resonant frequencies. However, surface and residual stresses can as well cause a shift of the sensor resonances. As result, understanding the impact of stresses in an accuracy and sensitivity of the mass sensors is a fundamental requirement for a rigorous analysis of experimental data. Here, we present a detailed theoretical study of the suspended nanomechanical resonators and mass sensors under axial load created by surface (residual) stresses or electrostatic (magnetostatic) forces. Easily accessible formulas allowing one either to accurately predict the resonant frequencies of the beam under tension/compression or to disentangle the effects of stresses (axial forces) and the molecule mass on the frequency shift of the suspended mass sensors have been derived. A dimensionless parameter enabling us a simple characterization of the device vibrational regime (i.e., beam, string, or beam...
影响因子：
8.6
作者：
Karabalin RB;Villanueva LG;Matheny MH;Sader JE;Roukes ML
通讯作者：
Roukes ML