An Integrated MEMS Gyroscope Array with Higher Accuracy Output.

An Integrated MEMS Gyroscope Array with Higher Accuracy Output.
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DOI:
10.3390/s8042886
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发表时间:
2008-04-28
期刊:
Sensors (Basel, Switzerland)
影响因子:
--
通讯作者:
Yuan W
Yuan W
中科院分区:
其他
文献类型:
--
作者:
Chang H;Xue L;Qin W;Yuan G;Yuan W

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本文设计了一种由两级最优滤波组成的集成微机电系统(MEMS)陀螺仪阵列方法,以提高陀螺仪的精度。在第一级滤波中,通过卡尔曼滤波将几个相同的陀螺仪组合成一个有效的单一器件,其性能可超过任何单个传感器。性能提升的关键在于对速率随机游走和角度随机游走等随机噪声源进行最优估计,以补偿测量值。特别是利用同类型不同陀螺仪噪声之间的互相关性来建立系统噪声协方差矩阵和测量噪声协方差矩阵,以便卡尔曼滤波进一步提高性能。其次,设计了一个具有六个状态的集成卡尔曼滤波器,借助磁力计和加速度计等外部传感器在姿态确定中进一步提高精度。实验表明,通过第一级滤波器,三个每小时偏差漂移为35度的陀螺仪可组合成一个每小时漂移为1.07度的虚拟陀螺仪,经过第二级滤波后,偏差漂移降低到每小时0.53度。这证明了所提出的集成MEMS陀螺仪阵列能够提高MEMS陀螺仪的精度,为在高精度应用领域使用这些低成本MEMS传感器提供了可能。
In this paper, an integrated MEMS gyroscope array method composed of two levels of optimal filtering was designed to improve the accuracy of gyroscopes. In the first-level filtering, several identical gyroscopes were combined through Kalman filtering into a single effective device, whose performance could surpass that of any individual sensor. The key of the performance improving lies in the optimal estimation of the random noise sources such as rate random walk and angular random walk for compensating the measurement values. Especially, the cross correlation between the noises from different gyroscopes of the same type was used to establish the system noise covariance matrix and the measurement noise covariance matrix for Kalman filtering to improve the performance further. Secondly, an integrated Kalman filter with six states was designed to further improve the accuracy with the aid of external sensors such as magnetometers and accelerometers in attitude determination. Experiments showed that three gyroscopes with a bias drift of 35 degree per hour could be combined into a virtual gyroscope with a drift of 1.07 degree per hour through the first-level filter, and the bias drift was reduced to 0.53 degree per hour after the second-level filtering. It proved that the proposed integrated MEMS gyroscope array is capable of improving the accuracy of the MEMS gyroscopes, which provides the possibility of using these low cost MEMS sensors in high-accuracy application areas.
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