Highly Sensitive and Flexible Capacitive Pressure Sensors Based on Vertical Graphene and Micro-Pyramidal Dielectric Layer.
Highly Sensitive and Flexible Capacitive Pressure Sensors Based on Vertical Graphene and Micro-Pyramidal Dielectric Layer.
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基于垂直石墨烯和微金字塔介电层的高灵敏度、柔性电容式压力传感器
DOI：
10.3390/nano13040701
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发表时间：
2023-02-11
期刊：
影响因子：
5.3
通讯作者：
Chen, Xuyuan
中科院分区：
文献类型：
--
作者：
Zhao, Ke;Han, Jiemin;Ma, Yifei;Tong, Zhaomin;Suhr, Jonghwan;Wang, Mei;Xiao, Liantuan;Jia, Suotang;Chen, Xuyuan
许多实际应用需要灵活的高灵敏度压力传感器。然而，使用常规材料难以实现这样的传感器。已经证明，对电极的形态和电极的形貌进行工程设计在提高电容式压力传感器的感测性能方面是有效的。以三维垂直石墨烯（VG）为电极，聚二甲基硅氧烷（PDMS）为介质层，制备了一种高灵敏度的柔性电容式压力传感器。VG的形态，尺寸和PDMS介电层中的微金字塔的间隔的工程显著提高了传感器的灵敏度。因此，传感器在0-1 kPa的压力范围内表现出高达6.04 kPa−1的出色灵敏度，在1-10 kPa的压力范围内表现出0.69 kPa−1的灵敏度。有限元分析表明，在压力下，在介质层中的微金字塔结构产生了显着的变形效果，从而改善了传感性能。最后，该传感器被用来监测手指关节运动，膝盖运动，面部表情和压力分布。实验结果表明，该传感器在人体运动检测和人机交互等领域具有广阔的应用前景。
Many practical applications require flexible high-sensitivity pressure sensors. However, such sensors are difficult to achieve using conventional materials. Engineering the morphology of the electrodes and the topography of the dielectrics has been demonstrated to be effective in boosting the sensing performance of capacitive pressure sensors. In this study, a flexible capacitive pressure sensor with high sensitivity was fabricated by using three-dimensional vertical graphene (VG) as the electrode and micro-pyramidal polydimethylsiloxane (PDMS) as the dielectric layer. The engineering of the VG morphology, size, and interval of the micro-pyramids in the PDMS dielectric layer significantly boosted the sensor sensitivity. As a result, the sensors demonstrated an exceptional sensitivity of up to 6.04 kPa−1 in the pressure range of 0–1 kPa, and 0.69 kPa−1 under 1–10 kPa. Finite element analysis revealed that the micro-pyramid structure in the dielectric layer generated a significant deformation effect under pressure, thereby ameliorating the sensing properties. Finally, the sensor was used to monitor finger joint movement, knee motion, facial expression, and pressure distribution. The results indicate that the sensor exhibits great potential in various applications, including human motion detection and human-machine interaction.
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