Characterization of Micro-Structured Ferrite Materials: Coarse and Fine Barium, and Photoresist Composites
Characterization of Micro-Structured Ferrite Materials: Coarse and Fine Barium, and Photoresist Composites
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微结构铁氧体材料的表征：粗细钡和光刻胶复合材料
DOI：
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发表时间：
2013
影响因子：
2.1
通讯作者：
John D. Williams
中科院分区：
文献类型：
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作者：
L. Chao;O. Sholiyi;M. Afsar;John D. Williams
制备了粗、细各向异性六方钡铁氧体（BaFe12O19）粉末及其光致抗蚀剂复合材料，并对其高频微电子应用进行了表征。利用自旋铸造技术，将负极光阻复合材料在硅片上印刷出部分填充的矩形微波铁氧体结构。采用扫描电镜（SEM）对粗铁氧体钡粉和细铁氧体钡粉的表面形貌进行了表征。采用准光学毫米波光谱法测量了铁氧体及其光刻胶复合材料在35 GHz ~ 75 GHz毫米波频率范围内的透射光谱。研究了粉末和光阻复合材料的铁磁共振和吸收特性。细粒钡粉比粗粒钡粉具有更低的铁磁谐振频率。而细钡光刻胶复合材料表现出与粗粉光刻胶复合材料相同的铁磁共振。
Coarse and fine anisotropic hexagonal barium ferrite (BaFe12O19) powders and their composites with photoresist were prepared and characterized for high frequency microelectronic applications. Partially filled rectangular microwave ferrite structures were printed on silicon wafer by spin-casting technique from the negative photo resist composites. A scanning electron microscope (SEM) was employed to characterize the surface morphology of the coarse and fine barium ferrite powders. Quasi-optical millimeter wave spectroscopy was used to measure the transmittance spectra of the ferrites and their photoresist composites in millimeter wave frequency range from 35 GHz to 75 GHz. The ferromagnetic resonance and absorption of powders and photoresist composites are investigated. Fine barium powder exhibits lower ferromagnetic resonant frequency than coarse barium powder due to the smaller particle size. But the photoresist composite of the fine barium shows same ferromagnetic resonance as the coarse powder photoresist composite.
影响因子：
14
作者：
Gach, Philip C.;Sims, Christopher E.;Allbritton, Nancy L.
通讯作者：
Allbritton, Nancy L.