Experimental Investigation and Numerical Analysis of Mechanical Ruling for an Aluminum-Coated Diffraction Grating
Experimental Investigation and Numerical Analysis of Mechanical Ruling for an Aluminum-Coated Diffraction Grating
复制标题
镀铝衍射光栅机械刻划的实验研究与数值分析
DOI：
10.1115/1.4034282
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发表时间：
2017-02
期刊：
影响因子：
--
通讯作者：
Ding H
中科院分区：
文献类型：
--
作者：
Zhang Baoqing;Wang Q;Shen N;Ding H
金刚石工具机械刻划是制作低密度衍射光栅的重要方法。在机械刻划中，铝或金的沉积膜由金刚石工具机械抛光以形成等间距和高质量的凹槽。这项工作的目的是评估铝膜的性能和刻划工具的负载条件对所得的凹槽形成的影响。利用扫描电子显微镜（SEM）和X射线衍射仪（XRD）研究了Al膜的微观结构。通过纳米压痕和划痕实验测量了Al膜的力学性能。在20 ~ 105 g的不同刻划载荷下，对10.5μm厚的Al膜进行了机械刻划实验。在机械刻划试验后，对金刚石刀具的沟槽几何形状进行了研究，并对刀具磨损情况进行了检验。最后，开发了一个三维（3D）热力耦合有限元（FE）模型，预测变形和温度场的微米级凹槽形成，将铝膜的性能和应变梯度塑性建模的尺寸效应。多道次模拟分析了不同加载条件下的槽型形成。通过模拟结果与实验测量的比较，该模型被证明是一个有用的数值工具，模拟使用金刚石工具的机械刻划过程。
The mechanical ruling process using a diamond tool is an important method for fabrication of low-density diffraction gratings. In mechanical ruling, a deposited film of aluminum or gold is mechanically burnished by the diamond tool to form equally spaced and high-quality grooves. The goal of this work is to evaluate the effects of Al film properties and ruling tool loading conditions on the resultant groove formation. The microstructure of the Al film is first studied using scanning electron microscope (SEM) and X-ray diffraction (XRD). The mechanical properties of the Al film are measured by nano-indentation and scratch tests. Mechanical ruling experiments are then carried out on a 10.5μm thick Al film under various ruling loads ranging from 20 to 105 g. The groove geometry is investigated, and the tool wear of the diamond tool is inspected after the mechanical ruling tests. Finally, a three-dimensional (3D) thermomechanical-coupled finite-element (FE) model is developed to predict the deformation and temperature fields for the micron-scale groove formation by incorporating the Al film properties and a strain-gradient plasticity for modeling the size effect. Multiruling pass simulations are performed to analyze the groove formation under different loading conditions. Through comparison of simulation results with experimental measurement, this model is demonstrated as a useful numerical tool for modeling the mechanical ruling process using a diamond tool.
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影响因子：
5.4
作者：
S. Kadlec;J. Musil;J. Vyskočil
通讯作者：
S. Kadlec;J. Musil;J. Vyskočil
DOI：
10.1016/s0263-4368(99)00008-6
发表时间：
1999-01-01
影响因子：
3.6
作者：
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通讯作者：
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影响因子：
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作者：
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影响因子：
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作者：
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通讯作者：
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DOI：
10.1115/1.4007464
发表时间：
2012-10
影响因子：
4
作者：
Hongtao Ding;Y. Shin
通讯作者：
Hongtao Ding;Y. Shin