ATLAS17LS – A large-format prototype silicon strip sensor for long-strip barrel section of ATLAS ITk strip detector
ATLAS17LS – A large-format prototype silicon strip sensor for long-strip barrel section of ATLAS ITk strip detector
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ATLAS17LS – 用于 ATLAS ITk 条状探测器长条状筒部分的大幅面原型硅条传感器
DOI：
10.1016/j.nima.2020.164928
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发表时间：
2020
影响因子：
1.4
通讯作者：
H. Zhu
中科院分区：
文献类型：
--
作者：
Y. Unno;Y. Abo;A. Affolder;P. Allport;I. Bloch;A. Blue;V. Fadeyev;J. Fernandez;I. Gregor;C. Haber;K. Hara;B. Hommels;S. Kamada;T. Koffas;H. Lacker;P. Miyagawa;U. Parzefall;C. A. Sawyer;M. Ullán;K. Yamamura;H. Zhu
在欧洲核子研究中心HL-LHC的ATLAS探测器中，ATLAS实验将用一个全新的内跟踪器(ITK)取代目前的内探测器。硅条探测器覆盖桶的外层和端盖部分。我们设计并制作了一种单面n+in-p交流耦合硅条传感器样机，用于外筒层长条(LS)，ATLAS17LS。它是6英寸可容纳的最大尺寸。硅片，外部尺寸为9.80(宽)×9.76(长)cm2。该传感器具有两排LS条段，每段条长4.83 cm，条距75.5μm，边缘细长设计。我们已经实现了高达1000V的高压运行技术，在HL-LHC运行结束时，辐照注量为5.6×1014neq/cm2时，信号采集良好。我们对ATLAS17LS的制造有两个目标：对传感器设计和制造质量进行鉴定，以及提供足够数量的传感器，用于制作条带探测器的构建块的原型。传感器是用铸造厂生产的标准晶片(物理厚度为320μm)分3批制造的。另外制作了10个传感器，其有效厚度为240μm，用于研究有效厚度对电荷收集的影响。另外还有5个传感器，经过特殊钝化处理，以研究钝化处理对湿度灵敏度的影响。对制作的传感器进行了目视检查，发现10μm的设计金属宽度太窄是不够的。供应商的初步测量表明，传感器满足规格：微放电V M D的起始电压高于工作电压V O P(第一批和第二批为700V；第三批为500V，这提高了成品率)，V O P时的泄漏电流为<；0.1μA/cm2，完全耗尽电压V F D<；330V，不良条带率<；1%。
The ATLAS experiment is going to replace the current Inner Detector with an all new inner tracker (ITk) in the ATLAS detector for HL-LHC at CERN. Silicon strip detectors cover the outer layers of the barrel and the endcap sections. We have designed and fabricated a prototype single-sided n+-in-p AC-coupled silicon strip sensor for the outer barrel layer with long strips (LS), ATLAS17LS. It is of the maximum allowable size to fit in a 6-in. silicon wafer, with an outer dimension of 9.80 (width)× 9.76 (length) cm 2. The sensor features two rows of LS strip segments, 4.83 cm strip length per segment, a strip pitch of 75.5 μ m, and a slim edge design. We have implemented technology for high voltage operation of up to 1000 V, with a good signal collection after irradiation fluence of 5.6× 10 14 n eq∕ cm 2 at the end of HL-LHC operation. We had two objectives for the ATLAS17LS fabrication: qualification of the sensor design and fabrication quality, and providing an adequate number of the sensors for prototyping the building blocks of the strip detector. The sensors were fabricated in 3 batches by HPK with standard wafers from the foundry (320 μ m physical thickness). Additional 10 sensors were fabricated with a thinner active thickness of 240 μ m to investigate the influence of active thickness on charge collection. Another additional 5 sensors, with special passivation to investigate the influence of passivation on humidity sensitivity. The visual inspection of fabricated sensors revealed an inadequacy that the designed metal width of 10 μ m was too narrow. The initial measurements by the vendor showed that the sensors fulfilled the specifications: onset voltages of Microdischarge V M D above the operation voltage V O P (700 V for the 1st and 2nd batches; 500 V for the 3rd batch, which has improved the yield), leakage currents of< 0.1 μ A/cm 2 at V O P, full depletion voltages V F D< 330 V, and rates of bad strips<< 1%.
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DOI：
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