Innovative and Tailor-made Resist and Working Stamp Materials for Advancing NIL-based Production Technology
Innovative and Tailor-made Resist and Working Stamp Materials for Advancing NIL-based Production Technology
复制标题
创新和定制的抗蚀剂和工作印模材料，用于推进基于 NIL 的生产技术
DOI：
10.2494/photopolymer.26.119
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发表时间：
2013
影响因子：
0.8
通讯作者：
G. Gruetzner
中科院分区：
文献类型：
--
作者：
A. Schleunitz;M. Vogler;I. Fernandez;H. Schift;G. Gruetzner
作为一种基于表面形貌复制的新型制造技术，纳米压印光刻对用作图案转移抗蚀剂、复制过程中的模具或永久应用的功能材料的材料提出了特定的要求。因此，高度专业化的聚合物解决方案对于纳米压印相关生产技术的创新发挥着关键作用，其中执行高通量和低成本的纳米光刻步骤。在这篇文章中，回顾了 Micro Resist Technology GmbH 最近的材料创新，重点关注 OrmoStamp 作为多功能工作印模材料，具有卓越的模具性能及其对各种纳米压印工艺的独特适用性。通过多维纳米流体装置的例子展示了定制材料如何促进使用纳米压印光刻的创新应用的大规模生产。
As a new manufacturing technique based on replication of surface topographies, nanoimprint lithography makes specific demands on materials used as resists for pattern transfer, as molds during replication or as functional materials for permanent application. Thus, highly specialized polymer solutions play a key role for the innovations in nanoimprint-related production technology where a high-throughput and low-cost nanolithography step is performed. In this contribution, recent material innovations at micro resist technology GmbH are reviewed with focus on OrmoStamp as versatile working stamp material with superior mold properties and its unique applicability to various nanoimprint processes. It is shown by the example of multidimensional nanofluidic devices how tailor-made materials facilitate mass production of innovative applications using nanoimprint lithography.
影响因子：
2.3
作者：
A. Finn;B. Lu;R. Kirchner;X. Thrun;K. Richter;W. Fischer
通讯作者：
A. Finn;B. Lu;R. Kirchner;X. Thrun;K. Richter;W. Fischer