Simulation-guided nanofabrication of high-quality practical tungsten probes.

Simulation-guided nanofabrication of high-quality practical tungsten probes.
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模拟引导的高质量实用钨探针纳米制造

DOI:
10.1039/d0ra03967e
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发表时间:
2020-06-24
期刊:
影响因子:
3.9
通讯作者:
--
中科院分区:
化学3区
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--
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微纳米钨探针广泛应用于表面分析、生物工程等领域。本文对电场分布、表面张力和鼓泡情况对电化学刻蚀行为的影响进行了全面的动态模拟,然后对尖端尺寸进行了模拟。结果表明,腐蚀速率与阴极尺寸决定的电场分布有关。颈位位于半月板而不是半月板底部。无气泡条件是稳定OH -和WO42 -离子分布的必要条件,以获得光滑的钨探针表面。这种模拟引导使得高长径比(10:1)、尖端超尖(40nm)和表面超光滑的纳米探针成为可能。这些探针已成功开发用于扫描隧道显微镜(STM)的高性能应用。获得了良好的原子分辨率的外延双层石墨烯图像,有力地验证了这些纳米探针在实际应用中的可行性。因此,这些纳米探针将对先进的分析科学和纳米到原子尺度的实验科学技术的发展大有裨益。
Micro/nanoscale tungsten probes are widely utilized in the fields of surface analysis, biological engineering, etc. amongst several others. This work performs comprehensive dynamic simulations on the influences of electric field distribution, surface tension and the bubbling situation on electrochemical etching behaviors, and then the tip dimension. Results show that the etching rate is reliant on the electric field distribution determined by the cathode dimension. The necking position lies in the meniscus rather than at the bottom of the meniscus. A bubble-free condition is mandatory to stabilize the distribution of OH− and WO42− ions for a smooth tungsten probe surface. Such simulation-guidance enables the nanofabrication of probes with a high aspect ratio (10 : 1), ultra-sharp tip apex (40 nm) and ultra-smooth surface. These probes have been successfully developed for high-performance application with Scanning Tunneling Microscopy (STM). The acquired decent atomic resolution images of epitaxial bilayer graphene robustly verify the feasibility of the practical level application of these nanoscale probes. Therefore, these nanoscale probes would be of great benefit to the development of advanced analytical science and nano-to-atomic scale experimental science and technology.
来自金属纳米尖的高能电子发射,由激烈的单周terahertz脉冲驱动。
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