Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer
Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer
复制标题
与梳状驱动扫描仪集成在绝缘体上硅晶圆上的变焦微镜
DOI：
--
复制
发表时间：
2012
影响因子：
2.7
通讯作者：
K. Hane
中科院分区：
文献类型：
--
作者：
T. Sasaki;K. Hane
我们提出了一种由绝缘体上硅晶片制成的变焦扫描微镜。变焦扫描微镜由具有旋转扫描功能的变焦微镜组成。扫描器和变焦镜分别由梳状和平行板静电致动器驱动。在静态模式下，反射镜在45V时旋转5.5°。在0~50V电压范围内，变焦扫描微镜的曲率从-4m-1(-128 mm焦距)变为+5m-1(+93 mm焦距)。证实了变焦扫描微镜反射激光的横向位置和光斑大小同时发生变化。此外，利用所提出的反射镜，利用光纤系统实现了共焦传感。
We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5° at 45 V in static mode. The curvature of the varifocal mirror is changed from -4 m-1 (-128-mm focal length) to +5 m-1 (+93-mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.
影响因子：
3.8
作者：
Ra, Hyejun;Piyawattanametha, Wibool;Solgaard, Olav
通讯作者：
Solgaard, Olav