On the spectroscopic detection of neutral species in a low-pressure plasma containing boron and hydrogen
On the spectroscopic detection of neutral species in a low-pressure plasma containing boron and hydrogen
复制标题
含硼氢低压等离子体中中性物质的光谱检测
DOI：
10.1088/0963-0252/12/4/309
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发表时间：
2003
影响因子：
3.8
通讯作者：
J. R pcke
中科院分区：
文献类型：
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作者：
B P Lavrov;M. Osiac;A. Pipa;J. R pcke
对 H2–Ar–B2H6 气体混合物（f = 2.45 GHz，P = 1.2–3.5 kW，p = 1–8 mbar）中的微波放电进行光谱研究，以提高含硼和氢的非平衡低压等离子体诊断的可能性。为此，应用了紫外可见光发射光谱和可调谐二极管激光器（TDLAS）的红外吸收光谱。结果表明，有关中性物质和气体温度的信息可以通过新的和改进的光谱方法获得。提出了一种根据测量的硼共振双峰（因重吸收而扭曲）成分的相对强度来确定硼原子的绝对数密度的方法，并测试了其有效性。发现在约2％的乙硼烷混合物下密度的最大值为3.8×10 11 个原子cm -3 。气体温度由 BH 和 H2 发射带旋转结构的强度分布以及 BH 分子吸收线轮廓的多普勒展宽确定。据观察，从旋转强度分布获得的气体温度值与从多普勒宽度获得的气体温度值非常一致（Tg = 700–1070 K）。根据对原子氢和分子氢的相对线强度以及气体温度的测量，并使用简单的激发-失活模型，发现分子氢的密度比原子氢的密度高约 40 倍。结果表明，TDLAS 检测到的氢化硼（B2H6、BH3 和 BH）的一些吸收线可用于等离子体诊断。
Spectroscopic studies of microwave discharges in H2–Ar–B2H6 gas mixtures (f = 2.45 GHz, P = 1.2–3.5 kW, p = 1–8 mbar) have been performed to improve the possibilities of diagnostics of non-equilibrium, low-pressure plasmas containing boron and hydrogen. For this purpose, UV–VIS optical emission spectroscopy and infrared absorption spectroscopy with tunable diode lasers (TDLAS) have been applied. It is shown that information about neutral species and the gas temperature may be obtained by means of new and modified spectroscopic methods. A method for the determination of the absolute number density of boron atoms from measured relative intensities of the components of the boron resonance doublet (distorted by reabsorption) is proposed and tested for validity. The maximum of the density was found to be 3.8 × 10 11 atoms cm −3 at an admixture of diborane of about 2%. The gas temperature was determined from the intensity distributions in the rotational structure of the emission bands of BH and H2 and from Doppler broadening of the absorption line profiles of the BH molecule. It was observed that values of the gas temperature obtained from the rotational intensity distributions are in good agreement with those obtained from Doppler widths (Tg = 700–1070 K). Based on measurements of the relative line intensities of atomic and molecular hydrogen and the gas temperature, and using a simple excitation–deactivation model, the density of molecular hydrogen was found to be about 40 times higher than the density of atomic hydrogen. It is shown that some absorption lines of boron hydrides (B2H6, BH3 and BH) detected by TDLAS may be used for plasma diagnostics.
影响因子：
4
作者：
T. Ichiki;T. Yoshida
通讯作者：
T. Ichiki;T. Yoshida
DOI：
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发表时间：
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