Structure and haemocompatibility of ZnO films deposited by radio frequency sputtering
Structure and haemocompatibility of ZnO films deposited by radio frequency sputtering
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射频溅射沉积ZnO薄膜的结构和血液相容性
DOI:
10.1088/1748-6041/4/5/055004
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发表时间:
2009-09
影响因子:
4
通讯作者:
Jia-Ying Ye, Zhan-Yun Huang, Chen Min, Shi-Ron
中科院分区:
文献类型:
--
作者:
Jia-Ying Ye, Zhan-Yun Huang, Chen Min, Shi-Ron
ZnO films were first deposited on silicon and glass substrates using radio frequency sputtering and then annealed in air at different temperatures from 300 to 700 °C. The microstructures, surface energy and optical properties of ZnO films were examined by
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