Workshop - Application of Plasma and Lasers in Electronics, Chemical, and Material Processing (San Diego State University; February 23-24, 1987)

该项目是关于在电子材料加工中使用等离子体和激光的讲习班。研讨会将于1987年2月23日至24日在圣地亚哥州立大学举行。所涵盖的主题涉及干法加工方法，包括：等离子体刻蚀机理、分子-表面相互作用、分子光谱在刻蚀和化学气相沉积诊断中的应用以及激光在微电子制造中的应用。讲习班包括一次小组讨论，重点是需要进一步广泛研究的关键科学和技术问题，以及今后为材料加工开发的新方法。

This project is a workshop on the use of plasmas and lasers in electronic material processing. The workshop is to be held at San Diego State University on February 23 and 24, 1987. The topics covered relate to dry processing methods and include: plasma etching mechanisms, molecule-surface-interactions, application of molecular spectroscopy to diagnostics of etching and chemical vapor deposition, and applications of laser to microelectronics fabrication. The workshop includes a panel discussion focusing on critical scientific and technical issues that need further extensive research and on new methods to be developed for material processing in the future.