Workshop - Application of Plasma and Lasers in Electronics, Chemical, and Material Processing (San Diego State University; February 23-24, 1987)

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This project is a workshop on the use of plasmas and lasers in electronic material processing. The workshop is to be held at San Diego State University on February 23 and 24, 1987. The topics covered relate to dry processing methods and include: plasma etching mechanisms, molecule-surface-interactions, application of molecular spectroscopy to diagnostics of etching and chemical vapor deposition, and applications of laser to microelectronics fabrication. The workshop includes a panel discussion focusing on critical scientific and technical issues that need further extensive research and on new methods to be developed for material processing in the future.