Microfabricated Electrostatic Motor System

本研究的目标是设计、开发和展示一种 微型静电马达 这项工作将应用技术 从微电子到机械设备的制造， 特别是半径为300微米的电动机， 2.4百万RPM 这项研究将建立在新兴技术的基础上 微传感器，并可能打开一个新的领域的微执行器。

The goal of this research is to design, develop, and demonstrate a microfabricated electrostatic motor. The work will apply technologies of microelectronics to the fabrication of mechanical devices, especially an electric motor with a radius of 300 microns capable of 2.4 million RPM. This research will build on the emerging technology of microsensors and could open a new area of microactuators.