Microfabricated Electrostatic Motor System

本研究的目的是设计、开发和演示微型静电马达。这项工作将把微电子技术应用于机械设备的制造，特别是半径为300微米、转速为240万转的电动机。这项研究将建立在新兴的微传感器技术的基础上，并可能开辟微致动器的新领域。

The goal of this research is to design, develop, and demonstrate a microfabricated electrostatic motor. The work will apply technologies of microelectronics to the fabrication of mechanical devices, especially an electric motor with a radius of 300 microns capable of 2.4 million RPM. This research will build on the emerging technology of microsensors and could open a new area of microactuators.