Proposal for Basic Research on Micro Electro-Mechanical Systems

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This research includes a collaborative effort between the Massachusetts Institute of Technology and Case Western Reserve University to continue research on flat, silicon micromotors. The research will extend the studies of pattern definition and final release. Fabricated motors will be used to study friction and wear, and to study new materials to reduce friction and wear. One goal of the proposed research will be the development of an improved set of micromotors. Finally, it is proposed to integrate sensors together with micromotors to produce a fully actuated, and possibly closed-loop controlled, micromechanism.