Engineering Initiation Award: Analysis of Convective Mass Transfer During Electrochemical Plating and Etching

工程启动奖：电化学电镀和蚀刻过程中的对流传质分析

• 批准号: 8709278
• 负责人: Peter Pintauro
• 金额: $ 7.05万
• 依托单位: Tulane University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1987
• 资助国家: 美国
• 起止时间: 1987-07-15 至 1990-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8709278&HistoricalAwards=false
• 关键词: Engineering; Initiation; Award; Analysis; Convective

Research Summary: The objective of this project is to evaluate the accuracy and study the range of applications of a new, non- contact electrochemical method for determining mass transfer boundary-layer thickness in natural and forced convection systems. The method, which will be applied to the electroplating and electro-dissolution of copper, converts concentration overpotentials after current interruption to a dimensionless concentration fraction. The experimental data is then matched to a theoretical electrode surface concentration decay model. Boundary-layer thicknesses are determined by equating the real time scale of the experimental data and the dimensionless time scale of the theoretical analysis. The advantages of the technique over other methods of determining boundary-layer thicknesses are: a) the technique can be applied to both electro-deposition and dissolution reactions over a wide range of applied currents, b) the method can be used to analyze convective mass transfer at irregularly shaped electrodes and c) the necessary experimental apparatus is simple and inexpensive. The proposed research regarding this new technique is as follows: a) theoretical and experimental boundary-layer analyses at a vertical flat plate copper anode and cathode with natural, forced and mixed natural/forced convection stirring, b) segmented copper anode and cathode boundary-layer experiments and c) boundary-layer thickness determinations in a semi-cylindrical cavity during plating and etching.

研究概要：本项目的目的是评估 的准确性和研究的应用范围的一个新的，非- 测定传质的接触电化学方法 自然对流和强制对流边界层厚度 系统. 该方法将应用于 铜的电镀和电解溶解， 电流中断后的浓度过电位 无因次浓度分数 实验数据 然后与理论电极表面浓度相匹配 衰变模型 边界层厚度由下式确定： 使实验数据的真实的时间尺度与 无量纲时间尺度的理论分析。 该技术相对于其他方法的优势 确定边界层厚度是：a）技术 可用于电沉积和溶解 B）该方法 可以用来分析对流传质在不规则 成形电极和c）必要的实验装置 简单且便宜。 建议研究关于 这种新技术如下：a）理论上和 垂直平板边界层实验分析 自然、强制和混合的铜阳极和阴极 自然/强制对流搅拌，B）分段铜阳极 和阴极边界层实验和c）边界层 在半圆柱形空腔中的厚度测定 电镀和蚀刻。