U.S.-France Cooperative Research: Theoretical and Experimental Studies of Low Energy LMIS Focused Ion and Droplet Beams

美法合作研究：低能LMIS聚焦离子束和液滴束的理论与实验研究

• 批准号: 8714799
• 负责人: Paul Cutler
• 金额: $ 0.87万
• 依托单位: Pennsylvania State Univ University Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1988
• 资助国家: 美国
• 起止时间: 1988-02-01 至 1991-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8714799&HistoricalAwards=false
• 关键词: U.S.; France; Cooperative; Research; Theoretical

This award will support collaborative research between Prof. Paul H. Cutler, Pennsylvania State University, University Park, and Drs. Pierre Sudraud and Ben Assayag of the Laboratoire de Microstructure et de Microelectronique - CNRS, Bagneux, France. These researchers will study the application of low-energy focused ion and droplet beams to microelectronics and microfabrication. While focused ion beams have been studied for direct exposure or mask-making for the fabrication of microelectronic devices at size ranges down to 0.1 micrometer, charged droplet beams have not been so studied. These beams, which if produced by an electrohydrodynamic liquid metal source can be as small as 1 nanometer in diameter, may be useful for mask repair and microcircuit modification. This study will address unanswered questions about droplet beam-surface interactions, beam stability, and effects of source parameters on beam performance. Both theoretical and experimental approaches will be used. The French laboratory has excellent facilities for the experimental study of focused ion and droplet beams. These include an ingenious double scanning electron microscope and ion column synchronized for simultaneous operation and, therefore, real-time study of the ion beam. Theoretical expertise will be brought to the project by the U.S. investigator. The complementary expertise of the collaborators, as well as the sophisticated equipment available for the study in France, will assure a mutually productive effort. This work may have important implications for the fabrication and repair of microelectronic components and integrated circuits.

该奖项将支持合作研究， Paul H.教授卡特勒，宾夕法尼亚州立大学， 大学公园，皮埃尔·苏德劳博士和本· 微结构和微结构分析 Microelectronique - CNRS，巴纽，法国。 这些 研究人员将研究低能量的应用， 聚焦离子和液滴束到微电子器件， 微细加工 虽然聚焦离子束已经被 研究直接曝光或面具制作， 尺寸范围的微电子器件的制造 低至0.1微米，带电液滴束没有 被如此研究。 这些光束，如果由一个 电流体动力液态金属源可以是 直径小至1纳米，可用于 掩模修复和微电路修改。 这 研究将解决有关液滴未回答问题 束-面相互作用、束稳定性和效应 对波束性能的影响。 两 将采用理论和实验方法。 法国实验室拥有一流的设施， 聚焦离子束和液滴束的实验研究。 其中包括一个巧妙的双扫描电子 显微镜和离子柱同步， 同时操作，因此，实时研究 的离子束。 理论知识将是 由美国调查员带来的项目。 的 合作者的互补专业知识，以及 因为这项研究所用的先进设备 在法国，这将确保一个互惠互利的努力。 这项工作可能会有重要的影响， 微电子元件的制造和修理 和集成电路.