Novel Radiation-Sensitive Materials

研究的目的是调查化学和 辐射敏感材料的物理特性， 官能化聚合物和无机引发剂。 的 这些材料中的聚合物组分含有碱敏感的 或还原-氧化位点，而引发剂是过渡 金属络合物或半导体颗粒，其产生碱或 在辐射激发下的还原-氧化当量。 这些材料将使用吸收和发射来表征 光谱学，快速热解，电子自旋共振 光谱、热重分析和分子量 测量. 最有前途的材料将被评估为 光刻胶和/或电子束抗蚀剂， 集成电路. 该研究将作为以下方面的合作进行： 格鲁吉亚大学和IBM Almanden研究实验室。 的 材料将被评估其潜在的应用， 电子工业。

The objective of the research is to investigate the chemical and physical properties of radiation-sensitive materials composed of a functionalized polymer and an inorganic initiator. The polymeric component in these materials contains a base-sensitive or reduction-oxidation site, while the initiator is a transition metal complex or semiconductor particle that generates base or reduction-oxidation equivalents upon excitation by the radiation. The materials will be characterized using absorption and emission spectroscopies, flash pyrolysis, electron spin resonance spectroscopy, thermogravimetric analysis, and molecular weight measurements. The most promising materials will be evaluated as photoresist and/or electron-beam resists for micropatterning for integrated circuits. The research will be conducted as a collaboration between the University of Georgia and IBM Almanden Research Laboratory. The materials will be evaluated for their potential applications in the electronics industry.