Preparation of Superconducting Thin Films of Perovskite Superconductors

本项目将研究低温沉积 YBa_2Cu_3O_7化合物在Al_2O_3SiO_2上的单相超导薄膜 和Si衬底。 本研究的主要目的是利用 活性反应蒸发（ARE）工艺的多功能性， 单相超导薄膜的低温生长 YBa2Cu3O7钙钛矿相。 该项目的目标也是利用 溅射沉积SrTiO 3、VO 2和TiO 2薄膜作为扩散 机制等

This project will investigate the low temperature deposition of single phase superconducting films of YBa2Cu3O7 compound on Al2O3SiO2 and Si substrates. The main objective of this research is to use the versatility of the Activated Reactive Evaporation (ARE) process for the low temperature growth of single phase superconducting films of the YBa2Cu3O7 perovskite phase. The project objective is also to use sputter deposited thin films of SrTiO3, VO2, and TiO2 as diffusion mechanisms.