Laser Based Studies of (I) Primary Dissociation Reaction Ki-netics of Chlorinated Monosilanes and Disilanes, and of (II)Absolute Trapping Reaction Kinetics of Chlorinated Silylenes

基于激光的 (I) 氯化甲硅烷和乙硅烷的初级解离反应动力学以及 (II) 氯化硅烯的绝对捕获反应动力学研究

• 批准号: 8719843
• 负责人: H. O'Neal
• 金额: $ 21.37万
• 依托单位: San Diego State University Foundation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1988
• 资助国家: 美国
• 起止时间: 1988-06-15 至 1991-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8719843&HistoricalAwards=false
• 关键词: Laser; Based; Studies; Primary; Dissociation

This renewal grant, funded jointly by the Special Projects and Inorganic Chemistry programs, provides for the support of Professors O'Neal, Ring and Tong at San Diego State University, a predominantely undergraduate institution. The research is directed at providing fundamental kinetic data for the decomposition of chlorinated silanes, which is the basis for the production of epitaxial silicon films, useful in the production of microelectronic devices. The Principal Investigators propose kinetic techniques which circumvent handling difficulties of chlorosilanes by integrating two laser-based techniques: Laser Powered Homogeneous Pyrolysis to induce reaction under wall-less conditions, and Laser Excited Fluoresence to monitor in-situ the reactions of the intermediates produced in the pyrolysis. Downstream chromatographic and mass spectroscopic analysis of the product gases will provide complete kinetic and thermodynamic data. Three co-principal investigators with complementary backgrounds applicable to the proposed research (gas phase kinetics and thermodynamics, inorganic synthesis and mechanisms and laser diagnostics and spectroscopy) will collaborate in directing this integrated research program. Two undergraduate students will participate in the research.

这笔更新补助金由特别项目和 无机化学课程，提供了支持 圣地亚哥州立大学的奥尼尔、林和童教授， 主要是本科院校。 这项研究是 旨在提供基本的动力学数据， 分解的氯化硅烷，这是基础， 外延硅膜的生产， 微电子器件 主要研究人员提出了动力学技术， 通过整合解决氯硅烷的处理困难 两种基于激光的技术：激光驱动的均质热解， 在无壁条件下诱导反应和激光激发 现场监测中间体反应的能力 在热解中产生。 下游色谱和质量 产物气体的光谱分析将提供完整的 动力学和热力学数据。 三位共同主要研究者 具有适用于拟议研究的互补背景 (gas相动力学和热力学，无机合成和 机制和激光诊断和光谱学）将 合作指导这个综合研究项目。 两 本科生将参与研究。