Laser Based Studies of (I) Primary Dissociation Reaction Ki-netics of Chlorinated Monosilanes and Disilanes, and of (II)Absolute Trapping Reaction Kinetics of Chlorinated Silylenes

这笔续期补助金由特别项目和无机化学计划联合资助，用于支持圣地亚哥州立大学的奥尼尔、林和童教授。圣地亚哥州立大学是一所以本科生为主的机构。这项研究旨在为氯化硅烷的分解提供基本的动力学数据，这是生产用于微电子设备生产的外延硅膜的基础。首席研究人员提出了动力学技术，通过集成两种基于激光的技术来绕过氯硅烷的处理困难：激光驱动的均匀热解在无壁条件下诱导反应，以及激光激发荧光原位监测在热解中产生的中间产物的反应。产品气体的下游色谱和质谱分析将提供完整的动力学和热力学数据。三名具有适用于拟议研究的互补背景的联合首席研究人员(气相动力学和热力学、无机合成和机理以及激光诊断学和光谱学)将合作指导这一综合研究计划。两名本科生将参与这项研究。

This renewal grant, funded jointly by the Special Projects and Inorganic Chemistry programs, provides for the support of Professors O'Neal, Ring and Tong at San Diego State University, a predominantely undergraduate institution. The research is directed at providing fundamental kinetic data for the decomposition of chlorinated silanes, which is the basis for the production of epitaxial silicon films, useful in the production of microelectronic devices. The Principal Investigators propose kinetic techniques which circumvent handling difficulties of chlorosilanes by integrating two laser-based techniques: Laser Powered Homogeneous Pyrolysis to induce reaction under wall-less conditions, and Laser Excited Fluoresence to monitor in-situ the reactions of the intermediates produced in the pyrolysis. Downstream chromatographic and mass spectroscopic analysis of the product gases will provide complete kinetic and thermodynamic data. Three co-principal investigators with complementary backgrounds applicable to the proposed research (gas phase kinetics and thermodynamics, inorganic synthesis and mechanisms and laser diagnostics and spectroscopy) will collaborate in directing this integrated research program. Two undergraduate students will participate in the research.