Sputtering Facility for Undergraduate Students

宾夕法尼亚印第安纳大学物理系将购买一个溅射系统和相关设备，这将成为一个新的高真空系统的一部分。目前的系统是用当地资金购买的，包含电阻加热和电子束蒸发器。溅射系统的加入将使学生了解这项重要的技术，并研究非晶薄膜的性质，光学涂层的性质，有趣的霍尔效应薄膜的制备，半导体器件的制造，以及使用现有技术无法获得的材料。

The Department of Physics at Indiana University of Pennsylvania will purchase a sputtering system and associated equipment which will become a part of a new high vacuum system. The present system, purchased with local funds, contains resistive heating and electron beam evaporators. The addition of the sputtering system will allow students to learn about this important technique and to study properties of amorphous thin films, properties of optical coatings, the preparation of interesting Hall effect films, the fabrication of semiconductor devices, and to use materials which have not been accessible with present techniques.