Engineering Research Equipment Grant: Suss MJB 3 UV 400 Mask Aligner

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It is critical that we acquire a new mask aligner such as the Karl Suss MJB 3. The MJB3 is designed to work with up to 3 inch wafers or with pieces of wafers which is more typical for our GaAs processing. The MJB 3 has gentle substrate handling, and highly sensitive and fragile materials such as GaAs, InP, and InSb can be used. The MJB 3 is also capable of 0.6 um resolution with the optics and exposure system we are requesting.