Techniques to Improve Charge Couple Device Quantum Efficiency

具有高灵敏度的电荷耦合器件（CCD） 真空紫外线、紫外线（UV）、可见光和近紫外线 红外波长对于许多建议的方法是必要的 天文学的研究。 最好的技术方法， 在这些波长中改进CCD灵敏度是背面 照明，但这种具有高灵敏度的设备， 商业上或其他方式不可用。 商业背面 目前和过去生产的照明CCD 表现出许多问题，包括低灵敏度，空间和 灵敏度的时间变化和光学失真， 干扰 最近，需要紫外线敏感的CCD用于太空飞行 应用促使人们研究各种方法， 背照式CCD技术。 背面充电 通过这项研究开发的治疗方法被证明是有前途的， 但是在具有期望的传感器之前仍然存在几个问题 特征产生。 第一阶段的研究探讨了CCD的问题和权衡 减薄和背面充电。 获得的结果 有前途和有见地，但两个重要领域需要 进一步调查。 这些都是量子的问题 效率滞后和使用可调涂层， 减少反射损失。 根据第二阶段SBIR奖， 量子效率滞后将通过化学方法降低， 改性背侧表面氧化物。 抗反射涂层 以减少反射 损耗、干涉条纹和保护背面 免受污染

Charge coupled devices (CCDs) with high sensitivity throughout the vacuum ultraviolet, ultraviolet (UV), visible, and near infrared wavelengths are necessary for many proposed investigations in astronomy. The best technical approach to improve CCD sensitivity in these wavelengths is backside illumination, but such devices with high sensitivity are not available, commercially or otherwise. Commercial backside illuminated CCDs produced currently and in the past have exhibited many problems including low sensitivity, spatial and temporal variations in sensitivity, and optical distortion and interference. Recently, the need for UV sensitive CCDs for space flight applications has prompted research into methods to improve backside illuminated CCD technology. The backside charging treatments developed through this research has proved promising, but several problems still exist before sensors with the desired characteristics are produced. The Phase I research explored the problems and tradeoffs of CCD thinning and backside charging. The results obtained were promising and insightful, however two significant areas need to be further investigated. These are the problem of quantum efficiency hysteresis and the use of antireflection coatings to reduce reflection losses. Under this Phase II SBIR Award, quantum efficiency hysteresis will be reduced by chemically modifying the backside surface oxide. Antireflection coatings will be applied to the backside surface to reduce reflection loss, interference fringing, and protect the backside surface from contamination.