Techniques to Improve Charge Couple Device Quantum Efficiency

提高电荷耦合器件量子效率的技术

• 批准号: 8907320
• 负责人: Gary Sims
• 金额: $ 21.84万
• 依托单位: Photometrics Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-09-01 至 1992-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8907320&HistoricalAwards=false
• 关键词: Techniques; Improve; Charge; Couple; Device

Charge coupled devices (CCDs) with high sensitivity throughout the vacuum ultraviolet, ultraviolet (UV), visible, and near infrared wavelengths are necessary for many proposed investigations in astronomy. The best technical approach to improve CCD sensitivity in these wavelengths is backside illumination, but such devices with high sensitivity are not available, commercially or otherwise. Commercial backside illuminated CCDs produced currently and in the past have exhibited many problems including low sensitivity, spatial and temporal variations in sensitivity, and optical distortion and interference. Recently, the need for UV sensitive CCDs for space flight applications has prompted research into methods to improve backside illuminated CCD technology. The backside charging treatments developed through this research has proved promising, but several problems still exist before sensors with the desired characteristics are produced. The Phase I research explored the problems and tradeoffs of CCD thinning and backside charging. The results obtained were promising and insightful, however two significant areas need to be further investigated. These are the problem of quantum efficiency hysteresis and the use of antireflection coatings to reduce reflection losses. Under this Phase II SBIR Award, quantum efficiency hysteresis will be reduced by chemically modifying the backside surface oxide. Antireflection coatings will be applied to the backside surface to reduce reflection loss, interference fringing, and protect the backside surface from contamination.

在真空紫外、紫外、可见光和近红外波段具有高灵敏度的电荷耦合器件（ccd）是许多天文学研究中所必需的。在这些波长中提高CCD灵敏度的最佳技术方法是背面照明，但这种高灵敏度的设备无论是在商业上还是其他方面都是不可用的。目前和过去生产的商用背照式ccd存在许多问题，包括灵敏度低、灵敏度时空变化、光学畸变和干涉等。近年来，航天应用对紫外敏感CCD的需求促使人们研究改进背面照明CCD技术的方法。通过这项研究开发的背面充电处理方法已被证明是有前途的，但在生产具有所需特性的传感器之前仍存在几个问题。第一阶段的研究探讨了CCD减薄和反向充电的问题和权衡。获得的结果是有希望的和有见地的，但是两个重要的领域需要进一步调查。这些是量子效率滞后和使用增透涂层来减少反射损失的问题。根据第二阶段SBIR奖，量子效率滞后将通过化学修饰后表面氧化物来减少。后表面采用增透涂层，减少反射损失，减少干涉条纹，保护后表面不受污染。