Acquisition of a Field-Emission Scanning Electron Microscope

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Funds are requested in partial support of the purchase of a field-emission gun scanning electron microscope (SEM) primarily for high resolution imaging of metals, ceramics, polymers, and composite materials. The resolution capability of the new instrument at 30KV(2nm) will be 5 times better than conventional SEMs using thermionic guns. At the same time the current in the electron beam will be 100x greater than a conventional SEM leading to better electron image contrast. Exceptional performance at low accelerating voltages (1kv) will provide surface images of uncoated polymers and ceramics with 10nm resolution and without detectable electron beam damage. X-ray emission spectroscopy at low voltages using these high currents will provide a substantial improvement in light element detection. Thus, a light element x-ray detector is also requested. Over the last 15 years, Lehigh University has maintained a leadership position in SEM research and in the education of SEM users. Over 25 faculty and over 50 graduate students currently use our 15 year-old research SEM. Since enhanced image resolution is the major advantage of the proposed field-emission SEM, all of these users will benefit from the new machine, and some will clearly be able to perform experiments never before possible.