Engineering Research Equipment Grant: Microwave Prober

这项工程研究设备补助金将支持购买一个级联微波探测站。该探测仪专为与微波网络分析仪配合使用而设计，可在分析仪端口和半导体基板表面之间提供精确、方便的微波连接。该设备将用于新型微波、毫米波和光电子半导体器件和电路的微波测量和表征。探测器将填补原本设备齐全的实验室设施的空白。该部门有几个惠普8510系统可供研究和指导。它还开发了半导体加工设施，用于制造最先进的高速器件。这些设备包括用于化合物半导体生长的OMCVD系统、离子反应蚀刻器、电子束蒸发器和亚微米掩模对准器。微波探头将增强使用广泛的微波仪器来表征所建造的设备的能力。七名教员参与了可能利用探测站的项目。这些项目的范围从毫米波成像阵列到共振隧道二极管振荡器和光电子器件。探测站的存在将影响对所有这些专题进行的研究的效率和质量。

This Engineering Research Equipment Grant will support purchase of a Cascade microwave probe station. This prober is designed for use in conjunction with a microwave network analyzer and provides a precise, convenient microwave connection between the analyzer ports and the surface of a semiconductor substrate. This equipment will be used for the microwave measurement and characterization of novel microwave, millimeter wave and optoelectronic semiconductor devices and circuits. The prober would fill a gap in what are otherwise well-equipped laboratory facilities. The department has several HP 8510 systems available for research and instruction. It has also developed semiconductor processing facilities for the fabrication of state-of- the-art high speed devices. These facilities include an OMCVD system for compound semiconductor growth, an ion reactive etcher, an e-beam evaporator and a sub-micron mask aligner. The microwave prober would enhance the ability to use the extensive microwave instrumentation to characterize the devices which are built. Seven faculty are involved with projects which could make use of the probe station. These projects range from millimeter wave imaging arrays to resonant tunneling diode oscillators and optoelectronic devices. The availability of a probe station would impact the efficiency and quality of the research done on all these topics.