Engineering Research Equipment Grant: Microwave Prober

工程研究设备补助金：微波探测器

• 批准号: 8909718
• 负责人: Sigfrid Yngvesson
• 金额: $ 2.02万
• 依托单位: University of Massachusetts Amherst
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-08-01 至 1991-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8909718&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Grant; Microwave

This Engineering Research Equipment Grant will support purchase of a Cascade microwave probe station. This prober is designed for use in conjunction with a microwave network analyzer and provides a precise, convenient microwave connection between the analyzer ports and the surface of a semiconductor substrate. This equipment will be used for the microwave measurement and characterization of novel microwave, millimeter wave and optoelectronic semiconductor devices and circuits. The prober would fill a gap in what are otherwise well-equipped laboratory facilities. The department has several HP 8510 systems available for research and instruction. It has also developed semiconductor processing facilities for the fabrication of state-of- the-art high speed devices. These facilities include an OMCVD system for compound semiconductor growth, an ion reactive etcher, an e-beam evaporator and a sub-micron mask aligner. The microwave prober would enhance the ability to use the extensive microwave instrumentation to characterize the devices which are built. Seven faculty are involved with projects which could make use of the probe station. These projects range from millimeter wave imaging arrays to resonant tunneling diode oscillators and optoelectronic devices. The availability of a probe station would impact the efficiency and quality of the research done on all these topics.

这项工程研究设备补助金将支持购买 级联微波探测站。 该探测器设计用于 结合微波网络分析仪， 分析仪端口和 半导体衬底表面。 该设备将用于 新型微波器件的微波测量与表征， 毫米波和光电半导体器件和电路。 探测器将填补一个空白，否则装备精良 实验室设施。 该部门有几个惠普8510系统 可用于研究和教学。 它还制定 半导体加工设施，用于制造 最先进的高速设备 这些设施包括OMCVD系统 对于化合物半导体生长，离子反应蚀刻器、电子束 蒸发器和亚微米掩模对准器。 微波探测器会 提高使用广泛的微波仪器的能力， 表征所构建的设备。 七名教师参与其中 可以利用探测站的项目。 这些 项目范围从毫米波成像阵列到谐振 隧穿二极管振荡器和光电器件。 的 探针站的可用性将影响效率， 对所有这些主题的研究质量。