Cross Sections of Technologically Important Gases (Physics)

技术上重要的气体的横截面（物理）

• 批准号: 8913096
• 负责人: Russell Bonham
• 金额: $ 30.52万
• 依托单位: Indiana University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-12-15 至 1993-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8913096&HistoricalAwards=false
• 关键词: Cross; Sections; Technologically; Important; Gases

Measurements will be undertaken of absolute electron and ion impact cross sections of technologically important gases, with the aim of developing the comprehensive data bases needed for modeling processes. Such data bases are important in laser technology, radiation physics and chemistry, and astrophysics, but the primary emphasis here will be on the data bases needed for modeling low temperature plasmas such as are used in surface processing.

将对技术上重要的气体的绝对电子和离子冲击横截面进行测量，目的是发展建模过程所需的综合数据库。这些数据库在激光技术、辐射物理和化学以及天体物理学中都很重要，但这里主要强调的是在表面加工中使用的低温等离子体建模所需的数据库。