Theoretical & Experimental Investigations of Surface Morphology Induced by Sputter Deposition & Removal of Materials

点击翻译按钮获取中文摘要

This grant co-funded between Materials Theory, and Ceramics and Electronic Materials initiates a program of research combining theoretical and experimental studies of the surface morphology of primarily sputtered materials. Theoretically, numerical and analytical studies will be undertaken on a model that embodies some of the key features of sputtering. Experimentally, the scanning tunnelling microscope will be used to study the surface structure of films grown in situ by sputter deposition and on surfaces formed by sputter etching.