A Micromotor-Based Spatial Light Modulation (SLM) System

随着静电微电机的出现， 小型、快速和廉价的空间光的可能性 调制（SLM）器件，特别是在 侵入性身体成像，导管导向激光消融 外科手术，图像扫描，矢量控制光束 调制器。 目前的SLM通常局限于其 运动范围或尺寸相当大。 微电子 机械系统（MEMS）技术为以下方面提供了可能性： 紧凑型、大挠度、多轴、高带宽、伺服 控制光束偏转器。 SRC有兴趣调查 特别是静电微电机，“摇摆电机”，用于 用作单自由度或双自由度空间光调制 设备. 这项拟议的研究将调查可能的 带宽和分辨率的设备，如何这些 参数受设备缩放、转子设计 位置传感器，因此基于摆动的 微致动器作为伺服控制SLM设备，用于各种 的应用程序。 具体而言，第一阶段研究将 包括系统建模、控制开发，以及 初步可行性论证两个学位的- 自由激光光束定向器。 基于微电机的SLM将开辟一个重要的 在快速发展的MEMS领域的应用领域， 快速发展的医疗激光领域。

With the advent of electrostatic micro-motors, come possibilities for small, fast and inexpensive spatial light modulation (SLM) devices, particularly in the areas of invasive body imaging, catheter-directed laser ablation surgery, image scanning vector-controlled light-beam modulators. Present-day SLMs are typically limited in their range of motion or are quite large in size. Micro electro- mechanical system (MEMS) technology opens possibilities for compact, large-deflection, multi-axis, high-bandwith, servo- controlled light-beam deflectors. SRC is interested in investigating the utilization of a particular electrostatic micromotor, the "Wobble Motor", for use as one- or two-degree-of-freedom spatial light modulation device. This proposed research will investigate the possible bandwith and resolution of such devices, how these parameters are affected by device scaling, the design of rotor position sensors, and thus the suitability of Wobble-based micro-acutators as servo-controlled SLM devices for a variety of applications. Specifically, the Phase I research would consist of system modelling, control development, and preliminary feasibility demonstration of a two-degree-of- freedom laser light-beam director. Micromotor-based SLMs would open up an important application area in the rapidly expanding MEMS field and the rapidly growing medical laser field.