Aerosol Applications to Thin Film Deposition of Silicon

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This research is funded under the National Science Foundation Small Grants for Exploratory Research Program. The primary goal of the research is to extend current aerosol deposition processes and instrumentation to process thin films of silicon. Thin films of silicon powder are deposited on substrates such as silicon, tantalum, titanium, or silicon dioxide. Effects of electrical charging of the powders, powder particle size, subsequent thermal treatment of the deposit, are being studied. The films are being characterized using scanning electron microscopy, X-ray diffraction, and electrical property measurements.