Laser Speckle Interferometric Microscope

Nova科技公司正在研究一种类似于Twyman-Green干涉仪的光学装置，使用激光束照亮显微镜标本和参考表面。样品的散射光在显微镜的像面上与参考面的散射光混合。利用CCD阵列监测散斑强度，检测散斑的相位变化，用于表面位移测量。参考照明被间歇性地阻断，这样就可以使用散斑模式相关技术来映射表面变形。此外，显微镜可以通过非相干光源进行常规成像。然后对三种不同操作模式的图像进行处理和集成以显示。

Nova Technology, Inc is investigating the use of a laser beam to illuminate a microscope specimen and a reference surface in an optical setup similar to a Twyman-Green interferometer. The scattered light from the specimen is mixed with the scattered light from the reference surface at the image plane of the microscope. By monitoring the speckle intensity with a CCD array, the phase change in speckle is detected for surface displacement measurement. Intermittently the reference illumination is blocked off so that surface deformation can be mapped using a speckle pattern correlation technique. In addition, the microscope can be illuminated by an incoherent light source for conventional imaging. The images from three different operating modes are then processed and integrated for display.