Laser Speckle Interferometric Microscope

Nova Technology，Inc.正在研究使用激光束 在一个实施例中照射显微镜样品和参考表面， 类似于Twyman-Green干涉仪的光学设置。 的 来自样品的散射光与来自样品的散射光混合， 来自参考表面的光在参考表面的像平面处， 显微镜 用CCD监测散斑强度 阵列，检测表面散斑的相位变化 位移测量 间歇性地引用 照明被阻挡，使得表面变形可以 使用散斑图案相关技术映射。 在 此外，显微镜可以被非相干光照射。 用于常规成像的光源。 来自三个国家的图像 然后处理和整合不同的操作模式， 显示.

Nova Technology, Inc is investigating the use of a laser beam to illuminate a microscope specimen and a reference surface in an optical setup similar to a Twyman-Green interferometer. The scattered light from the specimen is mixed with the scattered light from the reference surface at the image plane of the microscope. By monitoring the speckle intensity with a CCD array, the phase change in speckle is detected for surface displacement measurement. Intermittently the reference illumination is blocked off so that surface deformation can be mapped using a speckle pattern correlation technique. In addition, the microscope can be illuminated by an incoherent light source for conventional imaging. The images from three different operating modes are then processed and integrated for display.