REG: A Microwave Interferometer for Measuring Electron Concentrations in Plasma Discharges

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The University of Kansas Center for Research, Inc. will purchase microwave interferometry equipment under this NSF Engineering Research Equipment Grant for use in the Chemical and Petroleum Department, which will be dedicated to support research in engineering. The equipment will be used for several research projects on plasma processes used in the semiconductor industry including: (l) development of a novel technique to measure electron concentration measurement using electrical- impedance analysis, (2) development and testing of models of electron and ion kinetics in a plasma discharge, and (3) research on the neutral chemistry kinetics in plasma reactors. The overall goal of the research is to be able to operate and develop plasma processes better for the future needs of the semiconductor industry.