UV Spectroscopy of Metal-Organic Molecular Beam Epitaxy (MOMBE)

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This grant if for the purchase of an ultra-violet spectroscopy system for research on the chemistry and thermodynamics of epitaxial growth by chemical beam epitaxy in-situ and in real time. UV spectroscopy is a powerful scientific tool that is best suited for the study of growth processes by chemical beam epitaxy. The equipment described in this proposal will create the capability for UV absorption spectroscopy and laser-induced fluorescence spectroscopy. These two techniques will be used for the investigation of epitaxial growth of III-V semiconductor and alloy microstructures. In contrast to molecular beam epitaxy in which elemental sources are used, gas sources (metal- organics and hydrides) are used in chemical beam epitaxy. Consequently the chemical dynamics of epitaxial growth are more complex, but easier to measure than is the case in MBE. With the equipment requested in this proposal, it will be possible to obtain quantitative chemical information by probing the region just above the substrate. This equipment can provide information about the concentrations and electronic states of molecular and atomic species. The type of equipment needed for the UV spectroscopy described in this proposal is not available as a single unit from any supplier, and in order to perform such studies, it is necessary to assemble appropriate individual components.