Energy Pathways in Solids

固体中的能量途径

• 批准号: 9121272
• 负责人: Raul Baragiola
• 金额: $ 21万
• 依托单位: University of Virginia Main Campus
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-04-15 至 1995-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9121272&HistoricalAwards=false
• 关键词: Energy; Pathways; Solids

This project is a university-industry investigation of energy dissipation processes in solids which are bombarded by keV to MeV ions or 10 eV to keV electrons. After the diffusion of the deposited excited state energy and the emission of electrons, those excitations that have not been quenched decay by the emission of photons or by non-radiative processes such as the breaking of chemical bonds in a molecular solid and the production of significant atomic motions. Experiments that detect ejected atoms, molecules, electrons, ions and photons as well as IR studies of the bombarded solids, will be used to develop models for the energy deposition. Theory and modeling are also part of the project. The results have applications in the deposition of metals on surfaces and on processes in the microelectronics industry depending on ion beam lithographic methods.

这个项目是一个大学和工业界对能源的调查 keV到MeV轰击固体中的耗散过程 离子或10 eV至keV电子。 扩散后， 沉积的激发态能量和电子的发射，这些 未被猝灭的激发通过发射 光子或通过非辐射过程，例如 分子固体中的化学键以及 重要的原子运动 探测喷射原子的实验， 分子，电子，离子和光子以及红外研究的 轰击固体，将用于开发模型的能量 证词 理论和建模也是该项目的一部分。 的 结果可应用于金属在表面上的沉积 以及微电子工业中依赖于离子 电子束光刻方法。