Energy Deposition and Transport in Laser-Material Interactions

激光-材料相互作用中的能量沉积和传输

• 批准号: 9215617
• 负责人: Chang-Lin Tien
• 金额: $ 17.86万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-09-15 至 1995-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9215617&HistoricalAwards=false
• 关键词: Energy; Deposition; Transport; Laser; Material

The use of short-pulse lasers has generated new techniques to fabricate sophisticated microstructures and to synthesize advanced materials. These techniques have made tremendous impacts on the microelectronics industry. To improve the design and quality control of these techniques, a research plan is proposed to gain understanding of energy deposition and transport during short-pulse laser-material interactions and in microstructures. The work will develop more appropriate macroscopic models for energy deposition and transport processes by characterizing microscopic transport and interactions of energy carriers (e.g. electrons and phonons). Experimental investigation of sub-picosecond laser heating will also be carried out. The objective of the research program is to achieve a better understanding of the fundamental heat transfer mechanisms in different time scale regimes and to establish analytical framework for modelling fast laser heat of complex microsctructures.

短脉冲激光的使用催生了制造复杂微结构和合成先进材料的新技术。这些技术对微电子行业产生了巨大影响。为了改进这些技术的设计和质量控制，提出了一项研究计划，以了解短脉冲激光-材料相互作用期间和微观结构中的能量沉积和传输。这项工作将通过表征能量载体（例如电子和声子）的微观传输和相互作用，为能量沉积和传输过程开发更合适的宏观模型。 还将开展亚皮秒激光加热的实验研究。该研究项目的目标是更好地理解不同时间尺度下的基本传热机制，并建立复杂微结构快速激光热建模的分析框架。