Energy Deposition and Transport in Laser-Material Interactions

使用短脉冲激光产生了制造复杂微结构和合成先进材料的新技术。这些技术对微电子工业产生了巨大的影响。为了改进这些技术的设计和质量控制，提出了一项研究计划，以了解短脉冲激光与材料相互作用和微观结构中的能量沉积和传输。这项工作将通过表征能量载体（如电子和声子）的微观传输和相互作用，为能量沉积和传输过程开发更合适的宏观模型。还将进行亚皮秒激光加热的实验研究。本研究的目的是为了更好地理解不同时间尺度下的基本传热机制，并建立复杂微观结构的快速激光热建模的分析框架。

The use of short-pulse lasers has generated new techniques to fabricate sophisticated microstructures and to synthesize advanced materials. These techniques have made tremendous impacts on the microelectronics industry. To improve the design and quality control of these techniques, a research plan is proposed to gain understanding of energy deposition and transport during short-pulse laser-material interactions and in microstructures. The work will develop more appropriate macroscopic models for energy deposition and transport processes by characterizing microscopic transport and interactions of energy carriers (e.g. electrons and phonons). Experimental investigation of sub-picosecond laser heating will also be carried out. The objective of the research program is to achieve a better understanding of the fundamental heat transfer mechanisms in different time scale regimes and to establish analytical framework for modelling fast laser heat of complex microsctructures.