Presidential Faculty Fellow: X-Ray Optics

校长研究员：X 射线光学

• 批准号: 9253618
• 负责人: Chris Jacobsen
• 金额: $ 52万
• 依托单位: SUNY at Stony Brook
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-08-15 至 1998-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9253618&HistoricalAwards=false
• 关键词: Presidential; Faculty; Fellow; Ray; Optics

This research is aimed at the continued development of and student training in high resolution soft x-ray optical techniques for microscopy and lithography. Using an undulator at the National Synchrotron Light Source at nearby Brookhaven National Laboratory, we are able to obtain coherent beams of x-rays with a wavelength of 1-5 nm (the wavelength of visible light is 400- 700 nm). The PI has developed a scanning x-ray microscope which focusses these soft x-rays to a 50 nm spot, and this microscope is being used both for transmission microscopy studies of wet, thick biological specimens, and for the development of new imaging modalities. The PI has also demonstrated the ability to record x-ray holograms of biological specimens at 50 nm resolution, and our efforts in holography and developments at laser labs are leading towards the goal of recording 20 nm resolution holograms with psec exposure times, thus imaging a specimen in a timescale shorter than that of radiation damage. Finally, the PI has also developed a method for designing masks for x-ray lithographic manufacture of future integrated circuits based on referenceless on-axis computed holograms; it is hoped to bring this method from computer simulation to experimental demonstration.

这项研究旨在继续 发展和学生培训 高分辨软X射线光学技术 用于显微镜和平版印刷术。 使用 国家同步加速器光 附近的Brookhaven National 实验室，我们能够获得一致的 波长为1-5的X射线束 nm（可见光的波长为400- 700 nm）。 PI开发了一个 扫描X射线显微镜， 这些软X射线到一个50纳米的点， 显微镜被用于 透射显微镜研究湿， 厚厚的生物标本， 开发新的成像模式。 PI还展示了以下能力： 记录生物X射线全息图 样品在50纳米分辨率，我们的 全息术的努力和发展. 激光实验室正朝着 记录20 nm分辨率的全息图， 皮秒曝光时间，从而成像 在短于 辐射损伤。 最后，PI 还开发了一种方法， 用于X射线光刻制造的掩模 未来的集成电路基于 无参考轴计算 全息图;希望将这种方法 从计算机模拟到实验 示范