Fabrication of Microlenses for High Resolution Light Microscopy

用于高分辨率光学显微镜的微透镜的制造

• 批准号: 9261020
• 负责人: Mark Davidson
• 金额: $ 4.92万
• 依托单位: Spectel Company
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-05-01 至 1994-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9261020&HistoricalAwards=false
• 关键词: Fabrication; Microlenses; Resolution; Light; Microscopy

When a lens and it's focal length are extremely small, all aberrations scale with the size of the lens and at some point become ignorable. For highest resolution it is desirable to have a deep ultraviolet and high numerical aperture lens. Conventional lens making methods have proved inadequate for providing diffraction limited deep UV lenses which are reproducible enough to be used in metrology applications in the semiconductor industry. Microlenses as proposed here have the following advantages: Extremely reproducible; deep ultraviolet and large numerical apertures are possible; they have no polished curved surfaces they are potentially diffraction limited; and they are relatively broad band although they are made from only one type of glass (fused silica, UV grade). Applications include semiconductor metrology and inspection; biological and medical microscopy; and fiber optic coupling.

当一个透镜及其焦距非常小时， 像差与透镜的尺寸成比例 变得可接受。 对于最高分辨率，期望具有 一种深紫外高数值孔径透镜。 传统的透镜制造方法已被证明不足以 提供衍射受限的深UV透镜， 可再现性足以用于 半导体行业。 这里提出的微透镜具有以下优点： 可重复性极高;深紫外和大数值 孔是可能的;他们没有抛光曲面 它们是潜在的衍射限制;并且它们相对 宽带虽然他们是由只有一种玻璃 （熔融石英，UV级）。 应用包括半导体计量和检测; 生物和医学显微镜;以及光纤耦合。