Wavelength Stabilized Laser Diode Sources for Distance Measuring Interferometers

本研究项目将研究用于距离测量干涉仪或相关设备的激光二极管的波长稳定性。该计划的长期效益将是用于精密机床，半导体制造设备，精密计量和实验室测量的低成本线性距离测量干涉仪。本文将研究一种基于温度控制的激光二极管稳定化技术。温度由一个附加的热电（TE）冷却器控制，改变注入到激光二极管的电流，或者两者兼而有之。这种方法需要一个外部干涉仪来产生一个基于波长漂移的控制信号，如果要获得超过原始波长稳定性。在距离测量干涉仪中，这种控制信号几乎不需要额外的努力就能获得。该研究计划的成功完成将导致波长稳定源用于紧凑和低成本的线性距离测量干涉仪，可以在相同的市场上与玻璃秤竞争，以及目前由氦氖基线性距离测量干涉仪服务的许多市场。

This research project will investigate wavelength stabilization of a laser diode for use in a distance measuring interferometer or related device. The long range benefits of this program will be a low cost linear distance measuring interferometer for use in precision machine tools, semiconductor manufacturing equipment, precision metrology and laboratory measurements. A stabilization technique based upon temperature control of the laser diode will be researched. The temperature is controlled either by an attached thermoelectric (TE) cooler, varying the injection current to the laser diode or both. This approach requires an external interferometer to develop a control signal based upon wavelength drift if more than crude wavelength stability is to be obtained. In a distance measuring interferometer, this control signal can be obtained with little additional effort. Successful completion of this research program will result in a wavelength stabilized source for use in a compact and low cost linear distance measuring interferometer which can compete in the same markets as glass scales as well as many markets currently served by helium-neon based linear distance measuring interferometer.