A New Method of Synthesis for Micro-Electro-Mechanical Systems in a Single Phase: From Function and Fabrication

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9313330 Kota This project introduces a novel class of mechanical systems called compliant mechanisms for micro applications. Compliant mechanisms are single-piece flexible structures that deliver the desired motion by undergoing elastic deformation as opposed to the rigid body motions of conventional mechanisms. Thus, the principal objective of the project is to explore the possibility of using compliant mechanisms in the micro realm to meet the atypical design challenges posed by Microelectromechanical systems (MEMS). The study of MEMS is a fast growing area of research that has an immense potential to help accomplish useful tasks in numerous applications that involve mechanical manipulation at the micro level. This project addresses the design aspects of such systems. Many researchers have demonstrated the feasibility of their microfabrication technologies by building a variety of micromechanical elements. They include rotary motors, linear actuators and resonators, springs, grippers and gears all of which are in the size range of few tens of microns to few hundreds of microns. The limited capabilities of the micromachining techniques give way to new exigencies in fabrication and design at micro level that are nonexistent in the macro machinery.