Enhanced Utility of Radio Frequency Glow Discharge Sources

增强射频辉光放电源的实用性

• 批准号: 9420751
• 负责人: Adolph Beyerlein
• 金额: $ 30.5万
• 依托单位: Clemson University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-12-01 至 1997-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9420751&HistoricalAwards=false
• 关键词: Enhanced; Utility; Radio; Frequency; Glow

This project, supported in the Analytical and Surface Chemistry Program, will continue Professor Marcus' research into the fundamental and practical aspects of the application of radio frequency glow discharge (rf-GD) devices for the elemental analysis of solids by atomic absorption, atomic emission, and mass spectrometries. The primary focus of the research will involve the development of new methods for the analysis of nonconducting solids, such as oxides, depth-profiling of solid materials, methods for the analysis of polymer films, and the development of glow discharge sources for the generation of metal ions for chemical ionization mass spectrometry. This research, supported in the Analytical and Surface Chemistry Program, will increase our understanding of the fundamental aspects glow discharge devices and their application as sputtering devices and metal ion generators for use with atomic and mass spectrometries for the analysis of solid materials.

该项目由分析和表面化学计划支持，将继续马库斯教授对射频辉光放电(RF-GD)设备应用于通过原子吸收、原子发射和质谱仪进行固体元素分析的基础和实用方面的研究。这项研究的主要重点将包括开发非导电固体分析的新方法，如氧化物、固体材料的深度剖析、聚合物薄膜的分析方法，以及开发用于产生用于化学电离质谱仪的金属离子的辉光放电源。这项研究得到了分析和表面化学计划的支持，将增进我们对辉光放电设备的基本方面的了解，以及它们作为溅射设备和金属离子发生器的应用，用于原子和质谱学对固体材料的分析。