Integrated Optic Accelerometer with Six Degrees of Freedom

用于加速度计的常规技术产生其敏感轴垂直于晶片表面的微机械结构。需要新的微机械设计和新的换能技术，其允许微结构的敏感轴位于晶片的平面中，以便测量六个自由度。一种新的光学换能技术和一种新的微机械设计示出，它允许敏感轴位于晶片的平面内，并消除串扰。这具有的优点是，几个结构可以单片集成在同一晶片中，具有多自由度测量能力。该传感器采用聚合物波导，并与材料的激光烧蚀的使用。主要任务是开发一种与所使用的所有材料的特性兼容的制造工艺。将对影响聚合物波导性能的所有相关工艺参数进行全面研究。

Conventional techniques for accelerometers yield micromechanical structures whose sensitive axis is perpendicular to the surface of the wafer. There is a need for new micromechanical designs and new transduction techniques which allow the sensitive axis of the microstructures to lie in the plane of the wafer in order to measure six degrees of freedom. A new optical transduction technique and a new micromechanical design are illustrated which allow the sensitive axis to lie in the plane of the wafer and which eliminate cross-talk. This has the advantage that several structures can be integrated monolithically in the same wafer with multidegrees-of-freedom measurement capability. The sensor incorporates a polymer waveguide and is fabricated with the use of laser ablation of materials. The major task is to develop a fabrication process which is compatible with the characteristics of all the materials utilized. A comprehensive study of all the pertinent process parameters affecting the performance of the polymer waveguide will be conducted.