MEMS/MUMPS Short Course at Research Triangle Park, North Carolina

9501682 Mehregany本短期课程将概述MEMS技术，重点介绍如何利用多用户MEMS工艺(MUPS)计划。该计划旨在为包括学术界在内的所有国内组织提供低成本、容易获得MEMS技术的机会。这一短期课程将有20名学者参加，他们将结合本科生和研究生课程中讨论的MEMS能力。***

9501682 Mehregany This short course will provide an overview of MEMS technology with an emphasis on how to make use of the MultiUser MEMS Process (MUMPS) program at MCNC. This program exists to provide low-cost, easy access to MEMS technology for all domestic organizations including academia. The short course will be attended by twenty academics who will incorporate the MEMS capabilities discussed within undergraduate and graduate courseware. ***