Fundamental Studies of Gallium Arsenide Surface Passivation for Improved Semiconductor Manufacturing

9522566 Badzian本研究项目旨在对化学气相沉积（CVD）形成的金刚石薄膜进行基本了解，并通过假设CVD金刚石中的缺陷可能是由于sp3键合碳内的堆垛层错而不是sp2杂化引起的来实现这一目标。将进行研究，以确定原子结构的四面体形式的碳，不同于立方和六方，使用微波等离子体化学气相沉积。甲烷-氢等离子体的添加剂，例如B、N、O、Si、Ni、Ti，将用于影响生长金刚石表面上的反应途径，并在生长期间改变晶体结构。金刚石表面的原子分辨率结构将通过扫描隧道显微镜、反射式高能和低能电子衍射进行研究;其他材料表征技术包括拉曼光谱、X射线漫散射、光致发光、XPS和俄歇光谱。冷中子深度剖面将与NIST合作完成。该项目将是重要的利用独特的电子，热，和金刚石薄膜的机械性能，通过提高其晶体结构的基本理解，以及结构，性能和加工之间的关系。该计划的一个重要特点是在一个基本和技术上重要的领域对学生进行培训。***

9522566 Badzian This research project aims for fundamental understanding of diamond films formed by chemical vapor depostion(CVD), and approaches this goal through the hypothesis that defects in CVD diamond may be due to stacking faults within sp3-bonded carbon rather than arising from sp2 hybridization. Studies will be conducted to determine the atomic structure of tetrahedral forms of carbon, different than cubic and hexagonal, using microwave plasma chemical vapor deposition. Additives to the methane-hydrogen plasma, such as B, N, O, Si, Ni, Ti, will be used to influence reaction pathways on the growing diamond surface, and to modify the crystalline structure during growth. Atomic resolution structure of diamond surfaces will be studied by scanning tunneling microscopy, reflection high and low energy electron diffraction; other materials characterization techniques include Raman spectroscopy, X-ray diffuse scattering, photoluminescence, XPS and Auger spectroscopy. Cold neutron depth profiling will be done in collaboration with NIST. %%% This project will be important to the utilization of the unique electronic, thermal, and mechanical properties of diamond films through improved basic understanding of their crystalline structure, and the relationships gained between structure, properties, and processing. An important feature of the program is the training of students in a fundamentally and technologically significant area. ***