Fundamental Studies of Gallium Arsenide Surface Passivation for Improved Semiconductor Manufacturing

9522566 Badzian这个研究项目旨在从根本上了解化学气相沉积(CVD)形成的金刚石薄膜，并通过假设CVD钻石中的缺陷可能是由于sp3键合的碳内部的堆积缺陷而不是sp2杂化引起的来实现这一目标。将利用微波等离子体化学气相沉积来确定不同于立方和六方的四面体形式的碳的原子结构。甲烷-氢等离子体的添加剂，如B、N、O、Si、Ni、Ti，将被用来影响生长金刚石表面的反应路径，并在生长过程中改变晶体结构。金刚石表面的原子分辨率结构将通过扫描隧道显微镜、反射高能和低能电子衍射进行研究；其他材料表征技术包括拉曼光谱、X射线漫反射、光致发光、XPS和俄歇光谱。将与NIST合作进行冷中子深度剖析。该项目将通过提高对金刚石薄膜晶体结构的基本了解，以及结构、性能和加工之间的关系，对利用金刚石薄膜独特的电子、热和机械性能起到重要作用。该计划的一个重要特点是在一个具有根本意义和技术意义的领域对学生进行培训。***

9522566 Badzian This research project aims for fundamental understanding of diamond films formed by chemical vapor depostion(CVD), and approaches this goal through the hypothesis that defects in CVD diamond may be due to stacking faults within sp3-bonded carbon rather than arising from sp2 hybridization. Studies will be conducted to determine the atomic structure of tetrahedral forms of carbon, different than cubic and hexagonal, using microwave plasma chemical vapor deposition. Additives to the methane-hydrogen plasma, such as B, N, O, Si, Ni, Ti, will be used to influence reaction pathways on the growing diamond surface, and to modify the crystalline structure during growth. Atomic resolution structure of diamond surfaces will be studied by scanning tunneling microscopy, reflection high and low energy electron diffraction; other materials characterization techniques include Raman spectroscopy, X-ray diffuse scattering, photoluminescence, XPS and Auger spectroscopy. Cold neutron depth profiling will be done in collaboration with NIST. %%% This project will be important to the utilization of the unique electronic, thermal, and mechanical properties of diamond films through improved basic understanding of their crystalline structure, and the relationships gained between structure, properties, and processing. An important feature of the program is the training of students in a fundamentally and technologically significant area. ***