U.S.-Taiwan R.O.C. Cooperative Research: On the Application of Deep X-Ray Lithography in the formation of Microsensors and Microstructures

这是凯斯西部大学的刘忠俊博士和台湾新竹的同步辐射中心(SRRC)的姚成博士提出的为期三年的奖项。这项提议要求差旅资金支持这两个研究所之间的研究合作，以探索和开发深X射线光刻在微传感器和其他微结构形成中的应用。最早在德国开发的LIGA工艺已经展示了通过精密光刻创建各种微结构的独特能力。它是一项重要的技术，可以对现代生活的许多方面产生重大影响。LIGA、传感器和执行器的集成可以使许多微制造行业受益。在美国，从事这一领域研究的调查人员数量有限。刘博士是传感器微制造领域的专家，非常适合开展这项合作。台湾的同步加速器系统是最先进的设施，将为该项目提供束流时间和结构灵活性。这是一个独特的机会，通常不是美国设施提供的。该项目由台湾国家科学委员会共同资助，后者提供后勤费用，而国家科学基金会则为研究人员的旅行提供支持。

This is a three year award proposed by Dr. Chung-Chiun Liu, the Case Western University and Dr. Yao Cheng, the Synchrotron Radiation Center (SRRC) in Hsinchu, Taiwan. This proposal requests travel funds to support research cooperation between these two institutes for exploring and developing the application of deep X-ray lithography in the formation of microsensors and other microstructures. The LIGA process, first developed in Germany, has demonstrated unique capabilities for creating a wide variety of microstructures through precision lithography. It is an important technology and can have a major impact on many aspects of modern life. The integration of LIGA, sensors and actuators can benefit a large range of microfabrication industries. The number of investigators engaged in this area of research is limited in the United States. Dr. Liu is an expert in the microfabrication of sensors, uniquely suited for carrying out this cooperation. The synchrotron system in Taiwan is a state-of-the-art facility and will provide beam time and structure flexibility for this project. This is a unique opportunity not generally available from the U.S. facilities. This project is jointly funded by the Taiwan National Science Council, which is providing the logistical costs, while the NSF supports the investigator's travel.