U.S.-Taiwan R.O.C. Cooperative Research: On the Application of Deep X-Ray Lithography in the formation of Microsensors and Microstructures

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This is a three year award proposed by Dr. Chung-Chiun Liu, the Case Western University and Dr. Yao Cheng, the Synchrotron Radiation Center (SRRC) in Hsinchu, Taiwan. This proposal requests travel funds to support research cooperation between these two institutes for exploring and developing the application of deep X-ray lithography in the formation of microsensors and other microstructures. The LIGA process, first developed in Germany, has demonstrated unique capabilities for creating a wide variety of microstructures through precision lithography. It is an important technology and can have a major impact on many aspects of modern life. The integration of LIGA, sensors and actuators can benefit a large range of microfabrication industries. The number of investigators engaged in this area of research is limited in the United States. Dr. Liu is an expert in the microfabrication of sensors, uniquely suited for carrying out this cooperation. The synchrotron system in Taiwan is a state-of-the-art facility and will provide beam time and structure flexibility for this project. This is a unique opportunity not generally available from the U.S. facilities. This project is jointly funded by the Taiwan National Science Council, which is providing the logistical costs, while the NSF supports the investigator's travel.