Partial Support of the Board on Physics and Astronomy

小行星9532041 机床和计量仪器中的热控制和温度梯度是精密工程的基本限制。 最小化这些限制的一种方法是使用液压致动和传感，因为其能量的高效率传递。 这种方法也适用于油浴，这是超精密制造中实现热控制的方法之一。 本计画将开发以层流马达及直线驱动器为基础之超精密机床，并以油压差动计进行直线度及偏摆补偿。 这些组件是在斯坦福大学开发的，部分得到了NSF战略制造计划的支持，以消除通过节流导致湍流、噪音和振动的液压致动器控制。 主要的研究工作将是开发兼容的液压传感器和集成在超精密，安静的液压金刚石车削机床相当的执行器。 这项研究的影响主要是精密工程和超精密机床的基础设施。 与现有的超精密机器和设备相比，它承诺以更低的成本实现更好的热控制。

9532041 DeBra Thermal control and temperature gradients in machine tools and metrology instruments are fundamental limitations to precision engineering. A way to minimize these limitations is using hydraulic actuation and sensing, because of its high and efficient transfer of energy. This approach is also compatible with oil showering, one of the ways thermal control is achieved in ultra-precision manufacturing. This project will develop an ultra precision machine tool based on laminar flow motors and linear actuators, and oil differential gages for straightness and yaw compensation. These components were developed at Stanford University, in part with NSF Strategic Manufacturing Initiative support, to eliminated control of hydraulic actuators by throttling which leads to turbulence, noise and vibration. The major research efforts will be on development of compatible hydraulic sensors and integpation of the quite actuators in an ultra precision, quiet hydraulic diamond turning machine. The impact of this research is primarily on the infrastructure for precision engineering and ultra precision machine tools. It promises better thermal control at lower cost than is possible with existing ultra precision machines and equipment.