STTR: Wavelength Dispersive X-ray Spectrometer for Chemical Analysis in the Electron Microscope

9523202 Wolf本研究是研制一种安装在电子显微镜样品室内的紧凑型波长色散光谱仪（WDS）。WDS采用一种已知晶格间距的晶体，根据能量或波长分离收集到的x射线。这提供了更高的x射线峰能量分辨率，更高的峰与背景比，以及更好的元素x射线图像。将WDS装置安装在显微镜标本腔内，可以显著增加x射线采集角度，实现准确、深入的化学分析。微型WDS系统可以提供其他光谱仪无法提供的化学分析。这一发展将在商业上适用于数千种现有的标准电子显微镜，并可能在未来扩展到分析电子显微镜。

9523202 Wolf This research is to develop a compact wavelength dispersive spectrometer (WDS) to install inside the specimen chamber of an electron microscope. The WDS employs a crystal of known lattice spacing to separate collected x-rays by energy or wavelength. This provides higher energy-resolution of x-ray peaks, higher peak-to-background ratios, and better elemental x-ray images. Mounting the WDS units inside the microscope specimen chamber would significantly increase the x-ray collection angle and result in accurate and in-depth chemical analysis. A miniature WDS system would provide chemical analysis in situations where other spectrometer systems cannot. This development would be commercially applicable to several thousand existing standard electron microscopes, and may be extended to analytical electron microscopes in the future.