STTR: Wavelength Dispersive X-ray Spectrometer for Chemical Analysis in the Electron Microscope

小行星9523202 本研究旨在研制一种可安装于电子显微镜样品室内的小型波长色散光谱仪。 WDS采用已知晶格间距的晶体来通过能量或波长分离收集的X射线。 这提供了更高的X射线峰的能量分辨率、更高的峰背景比和更好的元素X射线图像。 将WDS装置安装在显微镜样品室内将显著增加X射线收集角度，并导致准确和深入的化学分析。 微型WDS系统将在其他光谱仪系统无法提供化学分析的情况下提供化学分析。 这一发展将在商业上适用于数千个现有的标准电子显微镜，并可能在未来扩展到分析电子显微镜。

9523202 Wolf This research is to develop a compact wavelength dispersive spectrometer (WDS) to install inside the specimen chamber of an electron microscope. The WDS employs a crystal of known lattice spacing to separate collected x-rays by energy or wavelength. This provides higher energy-resolution of x-ray peaks, higher peak-to-background ratios, and better elemental x-ray images. Mounting the WDS units inside the microscope specimen chamber would significantly increase the x-ray collection angle and result in accurate and in-depth chemical analysis. A miniature WDS system would provide chemical analysis in situations where other spectrometer systems cannot. This development would be commercially applicable to several thousand existing standard electron microscopes, and may be extended to analytical electron microscopes in the future.