Processing of Oxide Superconducting Electronic Devices by the Inhibition Technique

9531208 Ma本研究项目旨在推进高温超导氧化物的材料加工。 这些目标有三个方面：1）系统地注入不同反应性的杂质离子后，高温超导氧化物的电磁特性得到表征。 这些结果被用来确定抑制超导性的最佳注入条件。2）研究阻化材料的结构特性。 离子扩散，吸杂和沟道抑制的基本影响将被调查。 3）实现基于离子抑制技术的单层和多层高温超导器件和电路的可靠制造工艺。 三种不同的平面多层膜制造方法将继续进行。 重要的工艺相关的问题将得到解决，包括图案分辨率，过程控制和可靠性。 此外，包括高性能RF线圈和超导量子干涉设备在内的几个原型设备预计将在项目过程中进行演示。该研究将在与磁共振成像（MRI）和心磁学相关的先进电子和磁性设备的几个方面的技术相关性的基础水平上贡献基础材料科学知识。 此外，从该研究项目中获得的知识和理解预计将有助于通过提供设计和加工先进材料和设备的基本理解和基础，以提高利用高温超导材料的先进设备和电路的性能。 该计划的一个重要特点是通过在一个基本和技术上重要的领域对学生进行培训来整合研究和教育。***

9531208 Ma This research project aims to advance materials processing of high temperature superconducting oxides. The objectives are threefold: 1)To characterize the electrical and magnetic properties of high temperature superconductor (HTS) oxides which are systematically implanted with impurity ions of different reactivity. These results are used to determine optimum implantation conditions for inhibition of superconductivity. 2)To study the structural properties of inhibited materials. Fundamental effects of ion diffusion, gettering, and channeling on inhibition will be investigated. 3)To realize a reliable fabrication process for single layer and multilayer HTS devices and circuits based on the ion inhibition technique. Three different approaches to planar multilayer fabrication will be pursued. Important process related issues will be addressed including patterning resolution, process control, and reliability. Additionally, several prototype devices including high performance RF coils and superconducting quantum interference devices are expected to be demonstrated during the course of the project. %%% The research will contribute basic materials science knowledge at a fundamental level of technological relevance to several aspects of advanced electronic and magnetic devices with relevance to magnetic resonance imaging(MRI) and magnetocardiology. Additionally, the knowledge and understanding gained from this research project is expected to contribute in a general way to improving the performance of advanced devices and circuits utilizing high temperature superconducting materials by providing a fundamental understanding and a basis for designing and processing advanced materials and devices. An important feature of the program is the integration of research and education through the training of students in a fundamentally and technologically significant area. ***