SBIR Phase I: High Performance Magneto-Optical Recording Media

SBIR 第一阶段：高性能磁光记录介质

• 批准号: 9560371
• 负责人: Eleonora Witteles
• 金额: $ 7.5万
• 依托单位: World-wide Innovative Technology Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-05-01 至 1996-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9560371&HistoricalAwards=false
• 关键词: SBIR; Phase; Performance; Magneto; Optical

The proposed program will study the feasibility and develop the processing procedure for the construction of a high performance, high density, magneto-optical, reversible information storage media based on multilayer structures composed of a magnetic layer and a non-magnetic metallic layer. A number of multilayer structures have been proposed in the past. These include Pd/Co, Pt/Co, Pd/Fe, Tb/Fe, and Au/Co. These multilayer systems have shown performance superior to the traditionally used rare-earth -transition-metal alloys. All the multilayer structures proposed in the past use the conventional thin film deposition processes of evaporation or sputtering to deposit the thin films. As the required structures must consist of ultra-thin (one or two monolayers) with ultra-sharp, ultra-smooth interfaces and no interdiffusion between the layers can be tolerated, the vapor deposition processes, currently in use, can not achieve the surface roughness requirements of RMS values in the single Angstrom range. The proprietary deposition process, WIT-TIFID, developed by the proposer, can provide the all the above required thin film qualities essential for high performance devices. This program will develop the WIT-TIFID deposition process for magnetic metal multilayer structures (MMMS) to be used in magneto-optical (MO) recording media applications and show the advantages and superior perforrnance capabilities of the WIT-TIFID magnetic metal multilayer structures (MMMS) for applications in high performance, high density, reversible, information storage media technology. Potential Commercial Applications of the Research High Density reversible (read/write) memory ; Digital Videodisc (DVD) High density compact disc ; Memory systems; Gas sensors/ Hydrocarbon sensors ; Photoelectrods ; Water decomposition

本课题将研究构建基于磁性层和非磁性金属层组成的多层结构的高性能、高密度、磁光、可逆信息存储介质的可行性和工艺流程。过去已经提出了许多多层结构。这些包括Pd/Co， Pt/Co, Pd/Fe， Tb/Fe和Au/Co。这些多层体系表现出优于传统使用的稀土过渡金属合金的性能。以往提出的多层结构均采用蒸发或溅射等传统的薄膜沉积工艺沉积薄膜。由于所需的结构必须由超薄（一层或两层）单层组成，具有超锋利，超光滑的界面，并且层之间不能容忍相互扩散，因此目前使用的气相沉积工艺无法达到RMS值在单埃范围内的表面粗糙度要求。由提案人开发的专有沉积工艺WIT-TIFID可以提供高性能器件所需的所有上述薄膜质量。该项目将开发用于磁光（MO）记录介质应用的磁性金属多层结构（MMMS）的WIT-TIFID沉积工艺，并展示WIT-TIFID磁性金属多层结构（MMMS）在高性能、高密度、可逆、信息存储介质技术中的优势和卓越性能。研究高密度可逆（读/写）存储器的潜在商业应用数字视频光盘（DVD）高密度光盘；记忆系统;气体传感器/碳氢化合物传感器；Photoelectrods;水分解