SBIR Phase I: High Performance Magneto-Optical Recording Media

该计划将研究的可行性，并制定了一个高性能，高密度，磁光，可逆的信息存储介质的基础上，由磁性层和非磁性金属层的多层结构的建设过程。过去已经提出了许多多层结构。这些包括Pd/Co，Pt/Co，Pd/Fe，Tb/Fe和Au/Co。这些多层系统已显示出上级传统使用的稀土过渡金属合金的性能。过去提出的所有多层结构都使用蒸发或溅射的传统薄膜沉积工艺来存款薄膜。由于所需的结构必须由具有超尖锐、超光滑界面的超薄（一个或两个单层）组成，并且不能容忍层之间的相互扩散，因此目前使用的气相沉积工艺不能实现RMS值在单个埃范围内的表面粗糙度要求。专利的沉积工艺，WIT-TIFID，由提议者开发，可以提供所有上述所需的薄膜质量的高性能器件必不可少的。本项目将开发用于磁光（MO）记录介质应用的磁性金属多层结构（MMMS）的WIT-TIFID沉积工艺，并展示WIT-TIFID磁性金属多层结构（MMMS）在高性能、高密度、可逆信息存储介质技术中的应用的优点和上级性能。 研究的潜在商业应用高密度可逆（读/写）存储器;数字视盘（DVD）高密度光盘;存储系统;气体传感器/碳氢化合物传感器;光电极;水分解

The proposed program will study the feasibility and develop the processing procedure for the construction of a high performance, high density, magneto-optical, reversible information storage media based on multilayer structures composed of a magnetic layer and a non-magnetic metallic layer. A number of multilayer structures have been proposed in the past. These include Pd/Co, Pt/Co, Pd/Fe, Tb/Fe, and Au/Co. These multilayer systems have shown performance superior to the traditionally used rare-earth -transition-metal alloys. All the multilayer structures proposed in the past use the conventional thin film deposition processes of evaporation or sputtering to deposit the thin films. As the required structures must consist of ultra-thin (one or two monolayers) with ultra-sharp, ultra-smooth interfaces and no interdiffusion between the layers can be tolerated, the vapor deposition processes, currently in use, can not achieve the surface roughness requirements of RMS values in the single Angstrom range. The proprietary deposition process, WIT-TIFID, developed by the proposer, can provide the all the above required thin film qualities essential for high performance devices. This program will develop the WIT-TIFID deposition process for magnetic metal multilayer structures (MMMS) to be used in magneto-optical (MO) recording media applications and show the advantages and superior perforrnance capabilities of the WIT-TIFID magnetic metal multilayer structures (MMMS) for applications in high performance, high density, reversible, information storage media technology. Potential Commercial Applications of the Research High Density reversible (read/write) memory ; Digital Videodisc (DVD) High density compact disc ; Memory systems; Gas sensors/ Hydrocarbon sensors ; Photoelectrods ; Water decomposition