SBIR PHASE I: Nonlinear Optical Films on GaAs for Integrated Optics

这个小企业创新研究第一阶段项目的主要目标是在GaAs衬底上开发非线性光学（NLO）薄膜。GaAs上的NLO薄膜在集成光学中有许多潜在的应用。利用薄膜方法，可以开发一种集成光学技术，其中光源，非线性光学元件和检测器可以在同一衬底上开发。目前，在GaAs上生长器件级薄膜仍然是一个主要的技术挑战。到目前为止，在GaAs上的NLO薄膜的性能还没有超过或等于大块薄膜的性能。因此，迫切需要改进生长工艺，以提高薄膜的质量。此外，为了与GaAs集成，需要更低的生长温度。第一阶段的主要目标是探索离子束辅助脉冲激光沉积（IBPLD）作为在GaAs衬底上生长高质量非线性光学薄膜的一种新的低温技术的潜力。该方法将需要通过IBPLD技术合成NLO薄膜，并确定与GaAs加工兼容的关键工艺参数，从而获得最佳的非线性光学特性。作为原型，将Tc为88 C的KTa 0.52 Nb0.48 O3薄膜外延沉积在具有MgO缓冲层的GaAs衬底上，并评估其非线性光学性能。GaAs上的非线性光学薄膜在光信号处理、光计算和光束转向方面提供了独特的器件可能性。薄膜工艺技术是通用的，可能导致新一代集成光学器件。对于Neocera来说，非线性光学薄膜技术和商用IBPLD系统作为商品产品，可以进一步扩大现有的市场基础。

This Small Business Innovation Research Phase I project has the primary objective of developing nonlinear optical (NLO) thin films on GaAs substrates. NLO films on GaAs offer a number of potential applications in integrated optics. With the thin film approach it is possible to develop an integrated optics technology in which light sources, nonlinear optical components and detectors may be developed on the same substrate. At present, the growth of device quality films on GaAs remains a major technological challenge. Until now, the performance of the NLO films on GaAs has not exceeded or equaled the performance of the bulk counterparts. Therefore an immediate need exists for an improved growth process for promoting superior quality films compared to those presently available. Also, for integration with GaAs, lower growth temperatures are required. The primary objective of the proposed Phase I effort is to explore the potential of ion beam assisted pulsed laser deposition (IBPLD) as a new low temperature technique for the growth of high quality nonlinear optical films on GaAs substrates. The approach will require synthesis of NLO films by IBPLD technique and identification of critical process parameters that are compatible with GaAs processing leading to optimum nonlinear optical properties. As a prototype, KTa 0.52 Nb0.48 O3 films with a Tc of 88 C will be epitaxially deposited on GaAs substrates with MgO buffer layers and their nonlinear optical performance will be evaluated. The nonlinear optical films on GaAs offer unique device possibilities in optical signal processing, optical computing and beam steering. The film process technology is generic and could lead to a new generation of integrated optical devices. For Neocera, the nonlinear optical thin film technologies and commercial IBPLD systems, as commodity products, could further expand the existing market base.